JPS5349954A - Formation of organic material mask - Google Patents
Formation of organic material maskInfo
- Publication number
- JPS5349954A JPS5349954A JP12381676A JP12381676A JPS5349954A JP S5349954 A JPS5349954 A JP S5349954A JP 12381676 A JP12381676 A JP 12381676A JP 12381676 A JP12381676 A JP 12381676A JP S5349954 A JPS5349954 A JP S5349954A
- Authority
- JP
- Japan
- Prior art keywords
- formation
- organic material
- resist
- material mask
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Element Separation (AREA)
Abstract
PURPOSE: To correct the mask matching error with the heating flowing of the resist and to fill up the groove flat, by applying the photo resist on the entire surface of the test sample and removing selectively the resist on the projected region other than the groove on the sample surface.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12381676A JPS5349954A (en) | 1976-10-18 | 1976-10-18 | Formation of organic material mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12381676A JPS5349954A (en) | 1976-10-18 | 1976-10-18 | Formation of organic material mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5349954A true JPS5349954A (en) | 1978-05-06 |
Family
ID=14870039
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12381676A Pending JPS5349954A (en) | 1976-10-18 | 1976-10-18 | Formation of organic material mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5349954A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1117009A2 (en) * | 2000-01-14 | 2001-07-18 | Nec Corporation | Method of making resist pattern |
-
1976
- 1976-10-18 JP JP12381676A patent/JPS5349954A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1117009A2 (en) * | 2000-01-14 | 2001-07-18 | Nec Corporation | Method of making resist pattern |
EP1117009A3 (en) * | 2000-01-14 | 2001-09-05 | Nec Corporation | Method of making resist pattern |
US6589718B2 (en) | 2000-01-14 | 2003-07-08 | Nec Electronics Corporation | Method of making resist pattern |
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