JPS5349954A - Formation of organic material mask - Google Patents

Formation of organic material mask

Info

Publication number
JPS5349954A
JPS5349954A JP12381676A JP12381676A JPS5349954A JP S5349954 A JPS5349954 A JP S5349954A JP 12381676 A JP12381676 A JP 12381676A JP 12381676 A JP12381676 A JP 12381676A JP S5349954 A JPS5349954 A JP S5349954A
Authority
JP
Japan
Prior art keywords
formation
organic material
resist
material mask
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12381676A
Other languages
Japanese (ja)
Inventor
Mitsuo Nanba
Hisayuki Higuchi
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12381676A priority Critical patent/JPS5349954A/en
Publication of JPS5349954A publication Critical patent/JPS5349954A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE: To correct the mask matching error with the heating flowing of the resist and to fill up the groove flat, by applying the photo resist on the entire surface of the test sample and removing selectively the resist on the projected region other than the groove on the sample surface.
COPYRIGHT: (C)1978,JPO&Japio
JP12381676A 1976-10-18 1976-10-18 Formation of organic material mask Pending JPS5349954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12381676A JPS5349954A (en) 1976-10-18 1976-10-18 Formation of organic material mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12381676A JPS5349954A (en) 1976-10-18 1976-10-18 Formation of organic material mask

Publications (1)

Publication Number Publication Date
JPS5349954A true JPS5349954A (en) 1978-05-06

Family

ID=14870039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12381676A Pending JPS5349954A (en) 1976-10-18 1976-10-18 Formation of organic material mask

Country Status (1)

Country Link
JP (1) JPS5349954A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1117009A2 (en) * 2000-01-14 2001-07-18 Nec Corporation Method of making resist pattern

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1117009A2 (en) * 2000-01-14 2001-07-18 Nec Corporation Method of making resist pattern
EP1117009A3 (en) * 2000-01-14 2001-09-05 Nec Corporation Method of making resist pattern
US6589718B2 (en) 2000-01-14 2003-07-08 Nec Electronics Corporation Method of making resist pattern

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