JPS5574174A - Interpolation type insulating gate field effect transistor - Google Patents
Interpolation type insulating gate field effect transistorInfo
- Publication number
- JPS5574174A JPS5574174A JP14727178A JP14727178A JPS5574174A JP S5574174 A JPS5574174 A JP S5574174A JP 14727178 A JP14727178 A JP 14727178A JP 14727178 A JP14727178 A JP 14727178A JP S5574174 A JPS5574174 A JP S5574174A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- gate
- field effect
- interpolation type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005669 field effect Effects 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 4
- 238000000059 patterning Methods 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 238000004806 packaging method and process Methods 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14727178A JPS5574174A (en) | 1978-11-30 | 1978-11-30 | Interpolation type insulating gate field effect transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14727178A JPS5574174A (en) | 1978-11-30 | 1978-11-30 | Interpolation type insulating gate field effect transistor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5574174A true JPS5574174A (en) | 1980-06-04 |
JPS6129148B2 JPS6129148B2 (enrdf_load_stackoverflow) | 1986-07-04 |
Family
ID=15426428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14727178A Granted JPS5574174A (en) | 1978-11-30 | 1978-11-30 | Interpolation type insulating gate field effect transistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5574174A (enrdf_load_stackoverflow) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5752165A (en) * | 1980-09-13 | 1982-03-27 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
JPS5752166A (en) * | 1980-09-13 | 1982-03-27 | Semiconductor Energy Lab Co Ltd | Manufacture of semiconductor device |
JPS5799780A (en) * | 1980-12-11 | 1982-06-21 | Mitsubishi Electric Corp | Semiconductor device |
JPS58116770A (ja) * | 1981-12-29 | 1983-07-12 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JPS59222956A (ja) * | 1983-06-01 | 1984-12-14 | Hitachi Ltd | 半導体装置 |
JPS6070757A (ja) * | 1983-09-28 | 1985-04-22 | Hitachi Ltd | 半導体集積回路 |
-
1978
- 1978-11-30 JP JP14727178A patent/JPS5574174A/ja active Granted
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5752165A (en) * | 1980-09-13 | 1982-03-27 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
JPS5752166A (en) * | 1980-09-13 | 1982-03-27 | Semiconductor Energy Lab Co Ltd | Manufacture of semiconductor device |
JPS5799780A (en) * | 1980-12-11 | 1982-06-21 | Mitsubishi Electric Corp | Semiconductor device |
JPS58116770A (ja) * | 1981-12-29 | 1983-07-12 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JPS59222956A (ja) * | 1983-06-01 | 1984-12-14 | Hitachi Ltd | 半導体装置 |
JPS6070757A (ja) * | 1983-09-28 | 1985-04-22 | Hitachi Ltd | 半導体集積回路 |
Also Published As
Publication number | Publication date |
---|---|
JPS6129148B2 (enrdf_load_stackoverflow) | 1986-07-04 |
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