JPS6129148B2 - - Google Patents
Info
- Publication number
- JPS6129148B2 JPS6129148B2 JP53147271A JP14727178A JPS6129148B2 JP S6129148 B2 JPS6129148 B2 JP S6129148B2 JP 53147271 A JP53147271 A JP 53147271A JP 14727178 A JP14727178 A JP 14727178A JP S6129148 B2 JPS6129148 B2 JP S6129148B2
- Authority
- JP
- Japan
- Prior art keywords
- misfet
- complementary
- gate
- channel
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000000295 complement effect Effects 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 11
- 230000005669 field effect Effects 0.000 claims description 6
- 230000005684 electric field Effects 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 238000002955 isolation Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14727178A JPS5574174A (en) | 1978-11-30 | 1978-11-30 | Interpolation type insulating gate field effect transistor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14727178A JPS5574174A (en) | 1978-11-30 | 1978-11-30 | Interpolation type insulating gate field effect transistor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5574174A JPS5574174A (en) | 1980-06-04 |
| JPS6129148B2 true JPS6129148B2 (enrdf_load_stackoverflow) | 1986-07-04 |
Family
ID=15426428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14727178A Granted JPS5574174A (en) | 1978-11-30 | 1978-11-30 | Interpolation type insulating gate field effect transistor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5574174A (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5752166A (en) * | 1980-09-13 | 1982-03-27 | Semiconductor Energy Lab Co Ltd | Manufacture of semiconductor device |
| JPS5752165A (en) * | 1980-09-13 | 1982-03-27 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
| JPS5799780A (en) * | 1980-12-11 | 1982-06-21 | Mitsubishi Electric Corp | Semiconductor device |
| JPS58116770A (ja) * | 1981-12-29 | 1983-07-12 | Matsushita Electric Ind Co Ltd | 半導体装置 |
| JPS59222956A (ja) * | 1983-06-01 | 1984-12-14 | Hitachi Ltd | 半導体装置 |
| JPS6070757A (ja) * | 1983-09-28 | 1985-04-22 | Hitachi Ltd | 半導体集積回路 |
-
1978
- 1978-11-30 JP JP14727178A patent/JPS5574174A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5574174A (en) | 1980-06-04 |
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