JPS5572076A - Production of double layer polycrystaline silicone construction semiconductor device - Google Patents
Production of double layer polycrystaline silicone construction semiconductor deviceInfo
- Publication number
- JPS5572076A JPS5572076A JP14560278A JP14560278A JPS5572076A JP S5572076 A JPS5572076 A JP S5572076A JP 14560278 A JP14560278 A JP 14560278A JP 14560278 A JP14560278 A JP 14560278A JP S5572076 A JPS5572076 A JP S5572076A
- Authority
- JP
- Japan
- Prior art keywords
- film
- polycrystaline
- sio
- recess
- production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Semiconductor Memories (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14560278A JPS5572076A (en) | 1978-11-24 | 1978-11-24 | Production of double layer polycrystaline silicone construction semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14560278A JPS5572076A (en) | 1978-11-24 | 1978-11-24 | Production of double layer polycrystaline silicone construction semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5572076A true JPS5572076A (en) | 1980-05-30 |
JPS6149826B2 JPS6149826B2 (ja) | 1986-10-31 |
Family
ID=15388842
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14560278A Granted JPS5572076A (en) | 1978-11-24 | 1978-11-24 | Production of double layer polycrystaline silicone construction semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5572076A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0416816Y2 (ja) * | 1986-06-23 | 1992-04-15 |
-
1978
- 1978-11-24 JP JP14560278A patent/JPS5572076A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6149826B2 (ja) | 1986-10-31 |
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