JPS556844A - Method of formating wiring pattern - Google Patents

Method of formating wiring pattern

Info

Publication number
JPS556844A
JPS556844A JP7898078A JP7898078A JPS556844A JP S556844 A JPS556844 A JP S556844A JP 7898078 A JP7898078 A JP 7898078A JP 7898078 A JP7898078 A JP 7898078A JP S556844 A JPS556844 A JP S556844A
Authority
JP
Japan
Prior art keywords
etching
photoresist
aluminium
vacuum
formating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7898078A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6115582B2 (fr
Inventor
Masaharu Yorikane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP7898078A priority Critical patent/JPS556844A/ja
Publication of JPS556844A publication Critical patent/JPS556844A/ja
Publication of JPS6115582B2 publication Critical patent/JPS6115582B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP7898078A 1978-06-28 1978-06-28 Method of formating wiring pattern Granted JPS556844A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7898078A JPS556844A (en) 1978-06-28 1978-06-28 Method of formating wiring pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7898078A JPS556844A (en) 1978-06-28 1978-06-28 Method of formating wiring pattern

Publications (2)

Publication Number Publication Date
JPS556844A true JPS556844A (en) 1980-01-18
JPS6115582B2 JPS6115582B2 (fr) 1986-04-24

Family

ID=13677032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7898078A Granted JPS556844A (en) 1978-06-28 1978-06-28 Method of formating wiring pattern

Country Status (1)

Country Link
JP (1) JPS556844A (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5519873A (en) * 1978-07-28 1980-02-12 Mitsubishi Electric Corp Forming method of metallic layer pattern for semiconductor
JPS5715441A (en) * 1980-07-01 1982-01-26 Fujitsu Ltd Formation of aluminum interconnection
JPS5739538A (en) * 1980-08-20 1982-03-04 Matsushita Electric Ind Co Ltd Etching method of aluminum
JPS5749231A (en) * 1980-09-09 1982-03-23 Mitsubishi Electric Corp Forming method for electrode and wiring layer
JPS57130429A (en) * 1981-02-06 1982-08-12 Hitachi Ltd Formation of electrode wiring
JPS583253A (ja) * 1981-06-29 1983-01-10 Seiko Epson Corp 半導体基板上への金属配線形成方法
JPS6456253A (en) * 1987-08-25 1989-03-03 Honda Motor Co Ltd Vehicle burglar-proof device
JPS6456252A (en) * 1987-08-25 1989-03-03 Honda Motor Co Ltd Vehicle burglar-proof device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0470589A (ja) * 1990-07-12 1992-03-05 Koufu Nippon Denki Kk フォトセンサ信号検出回路

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5519873A (en) * 1978-07-28 1980-02-12 Mitsubishi Electric Corp Forming method of metallic layer pattern for semiconductor
JPS5715441A (en) * 1980-07-01 1982-01-26 Fujitsu Ltd Formation of aluminum interconnection
JPS5739538A (en) * 1980-08-20 1982-03-04 Matsushita Electric Ind Co Ltd Etching method of aluminum
JPS5749231A (en) * 1980-09-09 1982-03-23 Mitsubishi Electric Corp Forming method for electrode and wiring layer
JPS57130429A (en) * 1981-02-06 1982-08-12 Hitachi Ltd Formation of electrode wiring
JPS583253A (ja) * 1981-06-29 1983-01-10 Seiko Epson Corp 半導体基板上への金属配線形成方法
JPS6456253A (en) * 1987-08-25 1989-03-03 Honda Motor Co Ltd Vehicle burglar-proof device
JPS6456252A (en) * 1987-08-25 1989-03-03 Honda Motor Co Ltd Vehicle burglar-proof device

Also Published As

Publication number Publication date
JPS6115582B2 (fr) 1986-04-24

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