JPS5550662A - Manufacturing of mos-type semiconductor device - Google Patents

Manufacturing of mos-type semiconductor device

Info

Publication number
JPS5550662A
JPS5550662A JP12396078A JP12396078A JPS5550662A JP S5550662 A JPS5550662 A JP S5550662A JP 12396078 A JP12396078 A JP 12396078A JP 12396078 A JP12396078 A JP 12396078A JP S5550662 A JPS5550662 A JP S5550662A
Authority
JP
Japan
Prior art keywords
film
type
electrode
polycrystal silicon
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12396078A
Other languages
English (en)
Inventor
Toshio Kano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP12396078A priority Critical patent/JPS5550662A/ja
Publication of JPS5550662A publication Critical patent/JPS5550662A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP12396078A 1978-10-06 1978-10-06 Manufacturing of mos-type semiconductor device Pending JPS5550662A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12396078A JPS5550662A (en) 1978-10-06 1978-10-06 Manufacturing of mos-type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12396078A JPS5550662A (en) 1978-10-06 1978-10-06 Manufacturing of mos-type semiconductor device

Publications (1)

Publication Number Publication Date
JPS5550662A true JPS5550662A (en) 1980-04-12

Family

ID=14873588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12396078A Pending JPS5550662A (en) 1978-10-06 1978-10-06 Manufacturing of mos-type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5550662A (ja)

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