JPS5568676A - Junction type field effect semiconductor device - Google Patents
Junction type field effect semiconductor deviceInfo
- Publication number
- JPS5568676A JPS5568676A JP14191378A JP14191378A JPS5568676A JP S5568676 A JPS5568676 A JP S5568676A JP 14191378 A JP14191378 A JP 14191378A JP 14191378 A JP14191378 A JP 14191378A JP S5568676 A JPS5568676 A JP S5568676A
- Authority
- JP
- Japan
- Prior art keywords
- layers
- layer
- type
- films
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE: To accelerate the operation of a junction type field effect semiconductor device by surrounding part of a channel region under a source electrode pickup region by a polycrystalline gate region containing impurity to thereby reduce the capacity between the gate and the source thereof.
CONSTITUTION: An n--type layer 202 is epitaxially grown on an N+-type silicon substrate 201, polycrystalline silicon layers 203 and 203' are selectively formed thereon, an n--type layer 204 is epitaxially grown on the entire surface including them, and polycrystalline silicon layers 205 and 205' are formed on the layers 203 and 203', respectively. Then, mask layers 206, 206', 206" of Si3N4 are selectively formed on the layer 204, p+-type polycrystalline layers 207 and 207" are diffused in the layers 205 and 205', respectively, and a p+-type layer 208 is diffused in the layer 204 making contact with the layer 207. Then, the masks 206' and 206" are removed therefrom, SiO2 films 210 and 210' are grown on the entire surface thereof, the residual mask 206 is removed and heat treated, thick SiO2 films 211 and 211' are formed on the layers 207 and 207', and thick SiO2 film 212 is formed on the layer 204. Thereafter these films are used as masks to diffuse an n+-type layer 213 therein.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14191378A JPS5568676A (en) | 1978-11-17 | 1978-11-17 | Junction type field effect semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14191378A JPS5568676A (en) | 1978-11-17 | 1978-11-17 | Junction type field effect semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5568676A true JPS5568676A (en) | 1980-05-23 |
Family
ID=15303070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14191378A Pending JPS5568676A (en) | 1978-11-17 | 1978-11-17 | Junction type field effect semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5568676A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49121488A (en) * | 1973-03-20 | 1974-11-20 | ||
JPS5084180A (en) * | 1973-11-27 | 1975-07-07 |
-
1978
- 1978-11-17 JP JP14191378A patent/JPS5568676A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49121488A (en) * | 1973-03-20 | 1974-11-20 | ||
JPS5084180A (en) * | 1973-11-27 | 1975-07-07 |
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