JPS52144980A - Sos semiconductor device - Google Patents
Sos semiconductor deviceInfo
- Publication number
- JPS52144980A JPS52144980A JP6122876A JP6122876A JPS52144980A JP S52144980 A JPS52144980 A JP S52144980A JP 6122876 A JP6122876 A JP 6122876A JP 6122876 A JP6122876 A JP 6122876A JP S52144980 A JPS52144980 A JP S52144980A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- sos
- sos semiconductor
- letting
- interface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To obtain a SOS semiconductor device of improved electron mobility by letting the impurity concentration of the Si layer between source and drain regions have a maximum value at the interface with a gate insulation film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51061228A JPS605069B2 (en) | 1976-05-28 | 1976-05-28 | SOS semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51061228A JPS605069B2 (en) | 1976-05-28 | 1976-05-28 | SOS semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52144980A true JPS52144980A (en) | 1977-12-02 |
JPS605069B2 JPS605069B2 (en) | 1985-02-08 |
Family
ID=13165137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51061228A Expired JPS605069B2 (en) | 1976-05-28 | 1976-05-28 | SOS semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS605069B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5565472A (en) * | 1978-11-13 | 1980-05-16 | Fujitsu Ltd | Integrated circuit device |
JPS5586162A (en) * | 1978-12-23 | 1980-06-28 | Fujitsu Ltd | Device and manufacturing method for insulating substrate type semiconductor |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50137688A (en) * | 1974-04-19 | 1975-10-31 |
-
1976
- 1976-05-28 JP JP51061228A patent/JPS605069B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50137688A (en) * | 1974-04-19 | 1975-10-31 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5565472A (en) * | 1978-11-13 | 1980-05-16 | Fujitsu Ltd | Integrated circuit device |
JPS5586162A (en) * | 1978-12-23 | 1980-06-28 | Fujitsu Ltd | Device and manufacturing method for insulating substrate type semiconductor |
Also Published As
Publication number | Publication date |
---|---|
JPS605069B2 (en) | 1985-02-08 |
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