JPS52144980A - Sos semiconductor device - Google Patents

Sos semiconductor device

Info

Publication number
JPS52144980A
JPS52144980A JP6122876A JP6122876A JPS52144980A JP S52144980 A JPS52144980 A JP S52144980A JP 6122876 A JP6122876 A JP 6122876A JP 6122876 A JP6122876 A JP 6122876A JP S52144980 A JPS52144980 A JP S52144980A
Authority
JP
Japan
Prior art keywords
semiconductor device
sos
sos semiconductor
letting
interface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6122876A
Other languages
Japanese (ja)
Other versions
JPS605069B2 (en
Inventor
Shinji Onga
Yukio Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP51061228A priority Critical patent/JPS605069B2/en
Publication of JPS52144980A publication Critical patent/JPS52144980A/en
Publication of JPS605069B2 publication Critical patent/JPS605069B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a SOS semiconductor device of improved electron mobility by letting the impurity concentration of the Si layer between source and drain regions have a maximum value at the interface with a gate insulation film.
COPYRIGHT: (C)1977,JPO&Japio
JP51061228A 1976-05-28 1976-05-28 SOS semiconductor device Expired JPS605069B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51061228A JPS605069B2 (en) 1976-05-28 1976-05-28 SOS semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51061228A JPS605069B2 (en) 1976-05-28 1976-05-28 SOS semiconductor device

Publications (2)

Publication Number Publication Date
JPS52144980A true JPS52144980A (en) 1977-12-02
JPS605069B2 JPS605069B2 (en) 1985-02-08

Family

ID=13165137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51061228A Expired JPS605069B2 (en) 1976-05-28 1976-05-28 SOS semiconductor device

Country Status (1)

Country Link
JP (1) JPS605069B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565472A (en) * 1978-11-13 1980-05-16 Fujitsu Ltd Integrated circuit device
JPS5586162A (en) * 1978-12-23 1980-06-28 Fujitsu Ltd Device and manufacturing method for insulating substrate type semiconductor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50137688A (en) * 1974-04-19 1975-10-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50137688A (en) * 1974-04-19 1975-10-31

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565472A (en) * 1978-11-13 1980-05-16 Fujitsu Ltd Integrated circuit device
JPS5586162A (en) * 1978-12-23 1980-06-28 Fujitsu Ltd Device and manufacturing method for insulating substrate type semiconductor

Also Published As

Publication number Publication date
JPS605069B2 (en) 1985-02-08

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