JPS5545746A - Reactive polymer composition - Google Patents

Reactive polymer composition

Info

Publication number
JPS5545746A
JPS5545746A JP11921678A JP11921678A JPS5545746A JP S5545746 A JPS5545746 A JP S5545746A JP 11921678 A JP11921678 A JP 11921678A JP 11921678 A JP11921678 A JP 11921678A JP S5545746 A JPS5545746 A JP S5545746A
Authority
JP
Japan
Prior art keywords
formula
diamine
hydrocarbons
reacted
integer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11921678A
Other languages
English (en)
Inventor
Fusaji Shoji
Kazunari Takemoto
Kazuo Nate
Ataru Yokono
Tokio Isogai
Ichiro Tsubokawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11921678A priority Critical patent/JPS5545746A/ja
Publication of JPS5545746A publication Critical patent/JPS5545746A/ja
Pending legal-status Critical Current

Links

JP11921678A 1978-09-29 1978-09-29 Reactive polymer composition Pending JPS5545746A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11921678A JPS5545746A (en) 1978-09-29 1978-09-29 Reactive polymer composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11921678A JPS5545746A (en) 1978-09-29 1978-09-29 Reactive polymer composition

Publications (1)

Publication Number Publication Date
JPS5545746A true JPS5545746A (en) 1980-03-31

Family

ID=14755817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11921678A Pending JPS5545746A (en) 1978-09-29 1978-09-29 Reactive polymer composition

Country Status (1)

Country Link
JP (1) JPS5545746A (ja)

Cited By (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635131A (en) * 1979-08-21 1981-04-07 Siemens Ag Producing high heattstability relief structure
JPS6088939A (ja) * 1983-10-21 1985-05-18 Shin Etsu Chem Co Ltd 感光性組成物
JPS60100143A (ja) * 1983-08-29 1985-06-04 マイクロサイ，インコーポレイテッド 光パタ−ン化しうる誘電性組成物とその製造及び使用方法
JPS60198537A (ja) * 1984-01-24 1985-10-08 ゼネラル・エレクトリツク・カンパニイ ホトパタ−ニングの可能な誘電体組成物並びにその製造方法および使用方法
JPH0195133A (ja) * 1987-10-07 1989-04-13 Toshiba Silicone Co Ltd 末端に光重合性有機基を有するシロキサン−アミドブロックコポリマーおよびその製造方法
JPH01283554A (ja) * 1988-05-11 1989-11-15 Hitachi Ltd 耐熱感光性重合体組成物
JPH0292535A (ja) * 1988-09-30 1990-04-03 Hitachi Ltd 金属とポリイミドの複合成形体
US5342739A (en) * 1991-02-25 1994-08-30 Chisso Corporation Method of preparing a negative pattern utilizing photosensitive polymer composition containing quinonediazide compound and a poly(amido)imide precursor
US5441845A (en) * 1993-02-17 1995-08-15 Shin-Etsu Chemical Co., Ltd. Photosensitive resin composition comprising a polyimide precursor and a photosensitive diazoquinone
US5573886A (en) * 1994-01-21 1996-11-12 Shin-Etsu Chemical Co., Ltd. Photosensitive resin composition comprising a polyimide precursor and method for making a polyimide film pattern from the same
US5589319A (en) * 1992-06-25 1996-12-31 Chisso Corporation Photosensitive polyimide resin composition
EP1645909A2 (en) 2004-10-07 2006-04-12 Shin-Etsu Chemical Co., Ltd. Photo-curable resin composition comprising a polyimide, a process for forming a pattern therewith, and a substrate protecting film
EP1953183A2 (en) 2007-01-31 2008-08-06 Shin-Etsu Chemical Co., Ltd. Silphenylene-bearing polymer, photo-curable resin composition, patterning process, and substrate circuit protective film
US7638259B2 (en) 2006-08-22 2009-12-29 Shin-Etsu Chemical Co., Ltd. Polyimide resin soluble in aqueous alkaline solution, composition comprising the resin and cured coating prepared from the composition
EP2228400A1 (en) 2009-03-12 2010-09-15 Shin-Etsu Chemical Co., Ltd. Novel polyimide silicone, photosensitive resin composition containing the novel polyimide silicone, and method for pattern formation
EP2333015A2 (en) 2009-12-10 2011-06-15 Shin-Etsu Chemical Co., Ltd. Photo-curable resin composition, pattern forming method and substrate protecting film, and film-shaped adhesive and adhesive sheet using said composition
CN102108300A (zh) * 2009-12-25 2011-06-29 Jsr株式会社 液晶取向剂、液晶取向膜和液晶显示元件
CN105400523A (zh) * 2014-09-09 2016-03-16 Jsr株式会社 液晶取向剂、液晶取向膜以及液晶显示元件
EP3235803A1 (en) 2016-04-19 2017-10-25 Shin-Etsu Chemical Co., Ltd. Tetracarboxylic acid diester compound, polyimide precursor polymer and method for producing the same, negative photosensitive resin composition, positive photosensitive resin composition, patterning process, and method for forming cured film
EP3275857A1 (en) 2016-07-25 2018-01-31 Shin-Etsu Chemical Co., Ltd. Tetracarboxylic acid diester compound, polyimide precursor polymer and method for producing the same, negative photosensitive resin composition, patterning process, and method for forming cured film
EP3315504A1 (en) 2016-10-27 2018-05-02 Shin-Etsu Chemical Co., Ltd. Tetracarboxylic acid diester compound, polymer of polyimide precursor and method for producing same, negative photosensitive resin composition, patterning process, and method for forming cured film
KR20180107756A (ko) 2017-03-22 2018-10-02 신에쓰 가가꾸 고교 가부시끼가이샤 폴리이미드 전구체의 중합체, 포지티브형 감광성 수지 조성물, 네거티브형 감광성 수지 조성물, 패턴 형성 방법, 경화 피막 형성 방법, 층간 절연막, 표면 보호막 및 전자 부품
EP3495434A1 (en) 2017-12-05 2019-06-12 Shin-Etsu Chemical Co., Ltd. Novel tetracarboxylic dianhydride, polyimide resin and method for producing the same, photosensitive resin compositions, patterning process, method for forming cured film, interlayer insulating film, surface protective film, and electronic parts
EP3604390A1 (en) 2018-08-01 2020-02-05 Shin-Etsu Chemical Co., Ltd. Polymer having a structure of polyamide, polyamide-imide, or polyimide, photosensitive resin composition, patterning process, photosensitive dry film, and protective film for electric and electronic parts
KR20200121253A (ko) 2019-04-15 2020-10-23 신에쓰 가가꾸 고교 가부시끼가이샤 포지티브형 감광성 수지 조성물, 패턴 형성 방법, 경화 피막 형성 방법, 층간 절연막, 표면 보호막, 및 전자 부품
EP3896521A1 (en) 2020-04-14 2021-10-20 Shin-Etsu Chemical Co., Ltd. Polymer, photosensitive resin composition, patterning method, method of forming cured film, interlayer insulating film, surface protective film, and electronic component
EP3896114A1 (en) 2020-04-14 2021-10-20 Shin-Etsu Chemical Co., Ltd. Novel compound, polyimide resin and method of producing the same, photosensitive resin composition, patterning method and method of forming cured film, interlayer insulating film, surface protective film, and electronic component
EP3951499A1 (en) 2020-08-04 2022-02-09 Shin-Etsu Chemical Co., Ltd. Negative photosensitive resin composition, patterning process, method for forming cured film, interlayer insulation film, surface protective film, and electronic component
EP4056627A1 (en) 2021-03-09 2022-09-14 Shin-Etsu Chemical Co., Ltd. Polyimide-based polymer, positive photosensitive resin composition, negative photosensitive resin compostion, patterning method, method for forming cured film, interlayer insulating film, surface protective film, and electronic component
EP4273624A1 (en) 2022-05-02 2023-11-08 Shin-Etsu Chemical Co., Ltd. Negative photosensitive resin composition, patterning process, interlayer insulating film, surface protection film, and electronic component

Cited By (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635131A (en) * 1979-08-21 1981-04-07 Siemens Ag Producing high heattstability relief structure
JPH0368374B2 (ja) * 1979-08-21 1991-10-28 Siemens Ag
JPS60100143A (ja) * 1983-08-29 1985-06-04 マイクロサイ，インコーポレイテッド 光パタ−ン化しうる誘電性組成物とその製造及び使用方法
JPS6088939A (ja) * 1983-10-21 1985-05-18 Shin Etsu Chem Co Ltd 感光性組成物
JPS60198537A (ja) * 1984-01-24 1985-10-08 ゼネラル・エレクトリツク・カンパニイ ホトパタ−ニングの可能な誘電体組成物並びにその製造方法および使用方法
JPH0195133A (ja) * 1987-10-07 1989-04-13 Toshiba Silicone Co Ltd 末端に光重合性有機基を有するシロキサン−アミドブロックコポリマーおよびその製造方法
JPH01283554A (ja) * 1988-05-11 1989-11-15 Hitachi Ltd 耐熱感光性重合体組成物
JPH0292535A (ja) * 1988-09-30 1990-04-03 Hitachi Ltd 金属とポリイミドの複合成形体
US5342739A (en) * 1991-02-25 1994-08-30 Chisso Corporation Method of preparing a negative pattern utilizing photosensitive polymer composition containing quinonediazide compound and a poly(amido)imide precursor
US5589319A (en) * 1992-06-25 1996-12-31 Chisso Corporation Photosensitive polyimide resin composition
US5441845A (en) * 1993-02-17 1995-08-15 Shin-Etsu Chemical Co., Ltd. Photosensitive resin composition comprising a polyimide precursor and a photosensitive diazoquinone
US5573886A (en) * 1994-01-21 1996-11-12 Shin-Etsu Chemical Co., Ltd. Photosensitive resin composition comprising a polyimide precursor and method for making a polyimide film pattern from the same
US7485405B2 (en) 2004-10-07 2009-02-03 Shin-Etsu Chemical Co., Ltd. Photo-curable resin composition comprising a polyimide, a process for forming a pattern therewith, and a substrate protecting film
EP1645909A2 (en) 2004-10-07 2006-04-12 Shin-Etsu Chemical Co., Ltd. Photo-curable resin composition comprising a polyimide, a process for forming a pattern therewith, and a substrate protecting film
US7638259B2 (en) 2006-08-22 2009-12-29 Shin-Etsu Chemical Co., Ltd. Polyimide resin soluble in aqueous alkaline solution, composition comprising the resin and cured coating prepared from the composition
US7785766B2 (en) 2007-01-31 2010-08-31 Shin-Etsu Chemical Co., Ltd. Silphenylene-bearing polymer, photo-curable resin composition, patterning process, and substrate circuit protective film
EP1953183A2 (en) 2007-01-31 2008-08-06 Shin-Etsu Chemical Co., Ltd. Silphenylene-bearing polymer, photo-curable resin composition, patterning process, and substrate circuit protective film
US8263308B2 (en) 2009-03-12 2012-09-11 Shin-Etsu Chemical Co., Ltd. Polyimide silicone, photosensitive resin composition containing the novel polyimide silicone, and method for pattern formation
EP2228400A1 (en) 2009-03-12 2010-09-15 Shin-Etsu Chemical Co., Ltd. Novel polyimide silicone, photosensitive resin composition containing the novel polyimide silicone, and method for pattern formation
KR20100103393A (ko) 2009-03-12 2010-09-27 신에쓰 가가꾸 고교 가부시끼가이샤 신규 폴리이미드 실리콘 및 이것을 함유하는 감광성 수지 조성물, 및 패턴 형성 방법
EP2333015A2 (en) 2009-12-10 2011-06-15 Shin-Etsu Chemical Co., Ltd. Photo-curable resin composition, pattern forming method and substrate protecting film, and film-shaped adhesive and adhesive sheet using said composition
US8673537B2 (en) 2009-12-10 2014-03-18 Shin-Etsu Chemical Co., Ltd. Photo-curable resin composition, pattern forming method and substrate protecting film, and film-shaped adhesive and adhesive sheet using said composition
JP2011133825A (ja) * 2009-12-25 2011-07-07 Jsr Corp 液晶配向剤、液晶配向膜および液晶表示素子
CN102108300A (zh) * 2009-12-25 2011-06-29 Jsr株式会社 液晶取向剂、液晶取向膜和液晶显示元件
CN105400523A (zh) * 2014-09-09 2016-03-16 Jsr株式会社 液晶取向剂、液晶取向膜以及液晶显示元件
CN109913241B (zh) * 2014-09-09 2022-07-26 Jsr株式会社 液晶取向剂、液晶取向膜以及液晶显示元件
CN109913241A (zh) * 2014-09-09 2019-06-21 Jsr株式会社 液晶取向剂、液晶取向膜以及液晶显示元件
EP3235803A1 (en) 2016-04-19 2017-10-25 Shin-Etsu Chemical Co., Ltd. Tetracarboxylic acid diester compound, polyimide precursor polymer and method for producing the same, negative photosensitive resin composition, positive photosensitive resin composition, patterning process, and method for forming cured film
KR20170119643A (ko) 2016-04-19 2017-10-27 신에쓰 가가꾸 고교 가부시끼가이샤 테트라카르복실산디에스테르 화합물, 폴리이미드 전구체의 중합체 및 그 제조 방법, 네거티브형 감광성 수지 조성물, 포지티브형 감광성 수지 조성물, 패턴 형성 방법 및 경화 피막 형성 방법
US10457779B2 (en) 2016-04-19 2019-10-29 Shin-Etsu Chemical Co., Ltd. Tetracarboxylic acid diester compound, polyimide precursor polymer and method for producing the same, negative photosensitive resin composition, positive photosensitive resin composition, patterning process, and method for forming cured film
KR20180011729A (ko) 2016-07-25 2018-02-02 신에쓰 가가꾸 고교 가부시끼가이샤 테트라카르복실산 디에스테르 화합물, 폴리이미드 전구체 중합체 및 그 제조 방법, 네거티브형 감광성 수지 조성물, 패턴 형성 방법 및 경화 피막 형성 방법
US10216085B2 (en) 2016-07-25 2019-02-26 Shin-Etsu Chemical Co., Ltd. Tetracarboxylic acid diester compound, polyimide precursor polymer and method for producing the same, negative photosensitive resin composition, patterning process, and method for forming cured film
EP3275857A1 (en) 2016-07-25 2018-01-31 Shin-Etsu Chemical Co., Ltd. Tetracarboxylic acid diester compound, polyimide precursor polymer and method for producing the same, negative photosensitive resin composition, patterning process, and method for forming cured film
KR20180046385A (ko) 2016-10-27 2018-05-08 신에쓰 가가꾸 고교 가부시끼가이샤 테트라카르복실산디에스테르 화합물, 폴리이미드 전구체의 중합체 및 그 제조 방법, 네거티브형 감광성 수지 조성물, 패턴 형성 방법, 및 경화 피막 형성 방법
US10203601B2 (en) 2016-10-27 2019-02-12 Shin-Etsu Chemical Co., Ltd. Tetracarboxylic acid diester compound, polymer of polyimide precursor and method for producing same, negative photosensitive resin composition, patterning process, and method for forming cured film
EP3315504A1 (en) 2016-10-27 2018-05-02 Shin-Etsu Chemical Co., Ltd. Tetracarboxylic acid diester compound, polymer of polyimide precursor and method for producing same, negative photosensitive resin composition, patterning process, and method for forming cured film
US10816900B2 (en) 2016-10-27 2020-10-27 Shin-Etsu Chemical Co., Ltd. Tetracarboxylic acid diester compound, polymer of polyimide precursor and method for producing same, negative photosensitive resin composition, patterning process, and method for forming cured film
EP3398983A1 (en) 2017-03-22 2018-11-07 Shin-Etsu Chemical Co., Ltd. Polymer of polyimide precursor, positive type photosensitive resin composition, negative type photosensitive resin composition, patterning process, method for forming cured film, interlayer insulating film, surface protective film, and electronic parts
KR20180107756A (ko) 2017-03-22 2018-10-02 신에쓰 가가꾸 고교 가부시끼가이샤 폴리이미드 전구체의 중합체, 포지티브형 감광성 수지 조성물, 네거티브형 감광성 수지 조성물, 패턴 형성 방법, 경화 피막 형성 방법, 층간 절연막, 표면 보호막 및 전자 부품
US11150556B2 (en) 2017-03-22 2021-10-19 Shin-Etsu Chemical Co., Ltd. Polymer of polyimide precursor, positive type photosensitive resin composition, negative type photosensitive resin composition, patterning process, method for forming cured film, interlayer insulating film, surface protective film, and electronic parts
EP3495434A1 (en) 2017-12-05 2019-06-12 Shin-Etsu Chemical Co., Ltd. Novel tetracarboxylic dianhydride, polyimide resin and method for producing the same, photosensitive resin compositions, patterning process, method for forming cured film, interlayer insulating film, surface protective film, and electronic parts
KR20190066591A (ko) 2017-12-05 2019-06-13 신에쓰 가가꾸 고교 가부시끼가이샤 신규 테트라카르복실산이무수물, 폴리이미드 수지 및 그 제조 방법, 감광성 수지 조성물, 패턴 형성 방법 및 경화 피막 형성 방법, 층간 절연막, 표면 보호막, 전자 부품
US10919918B2 (en) 2017-12-05 2021-02-16 Shin-Etsu Chemical Co., Ltd. Tetracarboxylic dianhydride, polyimide resin and method for producing the same, photosensitive resin compositions, patterning process, method for forming cured film, interlayer insulating film, surface protective film, and electronic parts
EP3604390A1 (en) 2018-08-01 2020-02-05 Shin-Etsu Chemical Co., Ltd. Polymer having a structure of polyamide, polyamide-imide, or polyimide, photosensitive resin composition, patterning process, photosensitive dry film, and protective film for electric and electronic parts
KR20200014709A (ko) 2018-08-01 2020-02-11 신에쓰 가가꾸 고교 가부시끼가이샤 폴리아미드, 폴리아미드이미드, 폴리이미드 구조를 포함하는 중합체, 감광성 수지 조성물, 패턴 형성 방법, 감광성 드라이 필름 및 전기·전자 부품 보호용 피막
US11768434B2 (en) 2018-08-01 2023-09-26 Shin-Etsu Chemical Co., Ltd. Polymer having a structure of polyamide, polyamide-imide, or polyimide, photosensitive resin composition, patterning process, photosensitive dry film, and protective film for electric and electronic parts
EP3734362A1 (en) 2019-04-15 2020-11-04 Shin-Etsu Chemical Co., Ltd. Positive photosensitive resin composition, patterning process, method of forming cured film, interlayer insulation film, surface protective film, and electronic component
KR20200121253A (ko) 2019-04-15 2020-10-23 신에쓰 가가꾸 고교 가부시끼가이샤 포지티브형 감광성 수지 조성물, 패턴 형성 방법, 경화 피막 형성 방법, 층간 절연막, 표면 보호막, 및 전자 부품
EP3896114A1 (en) 2020-04-14 2021-10-20 Shin-Etsu Chemical Co., Ltd. Novel compound, polyimide resin and method of producing the same, photosensitive resin composition, patterning method and method of forming cured film, interlayer insulating film, surface protective film, and electronic component
KR20210127595A (ko) 2020-04-14 2021-10-22 신에쓰 가가꾸 고교 가부시끼가이샤 신규 화합물, 폴리이미드 수지 및 그 제조 방법, 감광성 수지 조성물, 패턴 형성 방법 및 경화 피막 형성 방법, 층간 절연막, 표면 보호막, 전자 부품
KR20210127594A (ko) 2020-04-14 2021-10-22 신에쓰 가가꾸 고교 가부시끼가이샤 중합체, 감광성 수지 조성물, 패턴 형성 방법, 경화 피막 형성 방법, 층간 절연막, 표면 보호막 및 전자 부품
EP3896521A1 (en) 2020-04-14 2021-10-20 Shin-Etsu Chemical Co., Ltd. Polymer, photosensitive resin composition, patterning method, method of forming cured film, interlayer insulating film, surface protective film, and electronic component
US11572442B2 (en) 2020-04-14 2023-02-07 International Business Machines Corporation Compound, polyimide resin and method of producing the same, photosensitive resin composition, patterning method and method of forming cured film, interlayer insulating film, surface protective film, and electronic component
EP3951499A1 (en) 2020-08-04 2022-02-09 Shin-Etsu Chemical Co., Ltd. Negative photosensitive resin composition, patterning process, method for forming cured film, interlayer insulation film, surface protective film, and electronic component
KR20220017362A (ko) 2020-08-04 2022-02-11 신에쓰 가가꾸 고교 가부시끼가이샤 네거티브형 감광성 수지 조성물, 패턴 형성 방법, 경화 피막 형성 방법, 층간 절연막, 표면 보호막 및 전자 부품
EP4056627A1 (en) 2021-03-09 2022-09-14 Shin-Etsu Chemical Co., Ltd. Polyimide-based polymer, positive photosensitive resin composition, negative photosensitive resin compostion, patterning method, method for forming cured film, interlayer insulating film, surface protective film, and electronic component
KR20220126645A (ko) 2021-03-09 2022-09-16 신에쓰 가가꾸 고교 가부시끼가이샤 폴리이미드를 포함하는 중합체, 포지티브형 감광성 수지 조성물, 네거티브형 감광성 수지 조성물, 패턴 형성 방법, 경화 피막 형성 방법, 층간 절연막, 표면 보호막 및 전자 부품
EP4273624A1 (en) 2022-05-02 2023-11-08 Shin-Etsu Chemical Co., Ltd. Negative photosensitive resin composition, patterning process, interlayer insulating film, surface protection film, and electronic component

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