JPS5518073A - Manufacture of variable-capacity diode - Google Patents
Manufacture of variable-capacity diodeInfo
- Publication number
- JPS5518073A JPS5518073A JP9136978A JP9136978A JPS5518073A JP S5518073 A JPS5518073 A JP S5518073A JP 9136978 A JP9136978 A JP 9136978A JP 9136978 A JP9136978 A JP 9136978A JP S5518073 A JPS5518073 A JP S5518073A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- impurity
- type
- substrate
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9136978A JPS5518073A (en) | 1978-07-26 | 1978-07-26 | Manufacture of variable-capacity diode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9136978A JPS5518073A (en) | 1978-07-26 | 1978-07-26 | Manufacture of variable-capacity diode |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5518073A true JPS5518073A (en) | 1980-02-07 |
Family
ID=14024454
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9136978A Pending JPS5518073A (en) | 1978-07-26 | 1978-07-26 | Manufacture of variable-capacity diode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5518073A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02183571A (ja) * | 1989-01-09 | 1990-07-18 | Nec Corp | バラクタダイオードの製造方法 |
JPH03227574A (ja) * | 1990-02-01 | 1991-10-08 | Nec Corp | バラクタダイオードの製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4845410U (ja) * | 1971-09-30 | 1973-06-14 | ||
JPS5197987A (ja) * | 1975-02-26 | 1976-08-28 | ||
JPS5214377A (en) * | 1975-07-25 | 1977-02-03 | Hitachi Ltd | Semiconductor device |
-
1978
- 1978-07-26 JP JP9136978A patent/JPS5518073A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4845410U (ja) * | 1971-09-30 | 1973-06-14 | ||
JPS5197987A (ja) * | 1975-02-26 | 1976-08-28 | ||
JPS5214377A (en) * | 1975-07-25 | 1977-02-03 | Hitachi Ltd | Semiconductor device |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02183571A (ja) * | 1989-01-09 | 1990-07-18 | Nec Corp | バラクタダイオードの製造方法 |
JPH03227574A (ja) * | 1990-02-01 | 1991-10-08 | Nec Corp | バラクタダイオードの製造方法 |
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