JPS5515262A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5515262A
JPS5515262A JP8876578A JP8876578A JPS5515262A JP S5515262 A JPS5515262 A JP S5515262A JP 8876578 A JP8876578 A JP 8876578A JP 8876578 A JP8876578 A JP 8876578A JP S5515262 A JPS5515262 A JP S5515262A
Authority
JP
Japan
Prior art keywords
film
recession
exposure amount
substrate
shoulder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8876578A
Other languages
English (en)
Inventor
Yoshio Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP8876578A priority Critical patent/JPS5515262A/ja
Publication of JPS5515262A publication Critical patent/JPS5515262A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP8876578A 1978-07-19 1978-07-19 Semiconductor device Pending JPS5515262A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8876578A JPS5515262A (en) 1978-07-19 1978-07-19 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8876578A JPS5515262A (en) 1978-07-19 1978-07-19 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5515262A true JPS5515262A (en) 1980-02-02

Family

ID=13951951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8876578A Pending JPS5515262A (en) 1978-07-19 1978-07-19 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5515262A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58197750A (ja) * 1982-05-12 1983-11-17 Mitsubishi Electric Corp 半導体装置及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58197750A (ja) * 1982-05-12 1983-11-17 Mitsubishi Electric Corp 半導体装置及びその製造方法

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