JPS5382260A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5382260A
JPS5382260A JP15829176A JP15829176A JPS5382260A JP S5382260 A JPS5382260 A JP S5382260A JP 15829176 A JP15829176 A JP 15829176A JP 15829176 A JP15829176 A JP 15829176A JP S5382260 A JPS5382260 A JP S5382260A
Authority
JP
Japan
Prior art keywords
scribing
resist film
separating regions
production
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15829176A
Other languages
Japanese (ja)
Inventor
Akiyuki Motoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15829176A priority Critical patent/JPS5382260A/en
Publication of JPS5382260A publication Critical patent/JPS5382260A/en
Pending legal-status Critical Current

Links

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  • Dicing (AREA)

Abstract

PURPOSE: To avert the occurrence of short-circuiting in later processes by covering the portions of a semiconductor substrate surface other than its scribing and separating regions with a photo resist film, scribing the substrate along the scribing and separating regions with a photo resist film, scribing the substrate along the scribing and separating regions and etching away the conductive contaminations deposited there and part of the substrate ends with the resist film as a mask.
COPYRIGHT: (C)1978,JPO&Japio
JP15829176A 1976-12-28 1976-12-28 Production of semiconductor device Pending JPS5382260A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15829176A JPS5382260A (en) 1976-12-28 1976-12-28 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15829176A JPS5382260A (en) 1976-12-28 1976-12-28 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5382260A true JPS5382260A (en) 1978-07-20

Family

ID=15668383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15829176A Pending JPS5382260A (en) 1976-12-28 1976-12-28 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5382260A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0472250A (en) * 1990-07-12 1992-03-06 Nisca Corp Double-feeding detecting method and device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0472250A (en) * 1990-07-12 1992-03-06 Nisca Corp Double-feeding detecting method and device

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