JPS55150250A - Manufacturing of semiconductor device - Google Patents

Manufacturing of semiconductor device

Info

Publication number
JPS55150250A
JPS55150250A JP5894879A JP5894879A JPS55150250A JP S55150250 A JPS55150250 A JP S55150250A JP 5894879 A JP5894879 A JP 5894879A JP 5894879 A JP5894879 A JP 5894879A JP S55150250 A JPS55150250 A JP S55150250A
Authority
JP
Japan
Prior art keywords
film
coating
coated
thickness
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5894879A
Other languages
English (en)
Inventor
Katsuhiro Hirata
Hirotsugu Harada
Hisao Yakushiji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5894879A priority Critical patent/JPS55150250A/ja
Publication of JPS55150250A publication Critical patent/JPS55150250A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP5894879A 1979-05-11 1979-05-11 Manufacturing of semiconductor device Pending JPS55150250A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5894879A JPS55150250A (en) 1979-05-11 1979-05-11 Manufacturing of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5894879A JPS55150250A (en) 1979-05-11 1979-05-11 Manufacturing of semiconductor device

Publications (1)

Publication Number Publication Date
JPS55150250A true JPS55150250A (en) 1980-11-22

Family

ID=13099042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5894879A Pending JPS55150250A (en) 1979-05-11 1979-05-11 Manufacturing of semiconductor device

Country Status (1)

Country Link
JP (1) JPS55150250A (ja)

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