GB1418969A - Method of making integrated circuits - Google Patents
Method of making integrated circuitsInfo
- Publication number
- GB1418969A GB1418969A GB4821873A GB4821873A GB1418969A GB 1418969 A GB1418969 A GB 1418969A GB 4821873 A GB4821873 A GB 4821873A GB 4821873 A GB4821873 A GB 4821873A GB 1418969 A GB1418969 A GB 1418969A
- Authority
- GB
- United Kingdom
- Prior art keywords
- metal
- holes
- strips
- insulating layer
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910052751 metal Inorganic materials 0.000 abstract 7
- 239000002184 metal Substances 0.000 abstract 7
- 229920002120 photoresistant polymer Polymers 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 239000004411 aluminium Substances 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0272—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers for lift-off processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
1418969 Integrated circuits MATSUSHITA ELECTRIC INDUSTRIAL CO Ltd 16 Oct 1973 [16 Oct 1972] 48218/73 Heading H1K In making an integrated circuit, after diffusing impurity into regions at one face of a semiconductor wafer, the wafer is coated with an insulating layer and then with a photoresist layer having holes at specified positions. After etching the insulating layer to expose the wafer at the holes a metal layer is deposited overall to a thickness equal to that of the insulating layer, and the photoresist layer and overlying metal removed leaving the metal only in the holes. Finally metal strips are formed extending over and contacting this metal. As described the wafer is of N-type silicon with parallel diffused P + strips in its surface, the insulating layer of silicon dioxide 1 Á thick and the metal vapour deposited aluminium. The holes are located over the diffused strips and the metal strips, formed from an overall deposit by photoresist etching, are orthogonal to the diffused strips and of the same width as the holes.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47104283A JPS4960870A (en) | 1972-10-16 | 1972-10-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1418969A true GB1418969A (en) | 1975-12-24 |
Family
ID=14376586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB4821873A Expired GB1418969A (en) | 1972-10-16 | 1973-10-16 | Method of making integrated circuits |
Country Status (7)
Country | Link |
---|---|
US (1) | US3945347A (en) |
JP (1) | JPS4960870A (en) |
CA (1) | CA989076A (en) |
DE (1) | DE2351943B2 (en) |
FR (1) | FR2203175B1 (en) |
GB (1) | GB1418969A (en) |
NL (1) | NL158026B (en) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4096623A (en) * | 1974-07-01 | 1978-06-27 | Siemens Aktiengesellschaft | Thyristor and method of producing the same |
FR2284981A1 (en) * | 1974-09-10 | 1976-04-09 | Radiotechnique Compelec | PROCESS FOR OBTAINING AN INTEGRATED SEMICONDUCTOR CIRCUIT |
US3985597A (en) * | 1975-05-01 | 1976-10-12 | International Business Machines Corporation | Process for forming passivated metal interconnection system with a planar surface |
US4045594A (en) * | 1975-12-31 | 1977-08-30 | Ibm Corporation | Planar insulation of conductive patterns by chemical vapor deposition and sputtering |
FR2340620A1 (en) * | 1976-02-06 | 1977-09-02 | Ibm | MANUFACTURING PROCESS OF A LARGE-SCALE INTEGRATED DEVICE HAVING A FLAT SURFACE |
US4035276A (en) * | 1976-04-29 | 1977-07-12 | Ibm Corporation | Making coplanar layers of thin films |
US4564997A (en) * | 1981-04-21 | 1986-01-21 | Nippon-Telegraph And Telephone Public Corporation | Semiconductor device and manufacturing process thereof |
JPS57176746A (en) * | 1981-04-21 | 1982-10-30 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor integrated circuit and manufacture thereof |
US4392298A (en) * | 1981-07-27 | 1983-07-12 | Bell Telephone Laboratories, Incorporated | Integrated circuit device connection process |
US4440804A (en) * | 1982-08-02 | 1984-04-03 | Fairchild Camera & Instrument Corporation | Lift-off process for fabricating self-aligned contacts |
JPS5982746A (en) * | 1982-11-04 | 1984-05-12 | Toshiba Corp | Electrode wiring method of semiconductor device |
US4631806A (en) * | 1985-05-22 | 1986-12-30 | Gte Laboratories Incorporated | Method of producing integrated circuit structures |
JPH02125422A (en) * | 1988-11-02 | 1990-05-14 | Nec Corp | Manufacture of semiconductor device |
KR0121106B1 (en) * | 1994-02-15 | 1997-11-10 | 김주용 | Method of metal wiring of semiconductor element |
US5854128A (en) | 1996-04-29 | 1998-12-29 | Micron Technology, Inc. | Method for reducing capacitive coupling between conductive lines |
TW350099B (en) * | 1998-01-26 | 1999-01-11 | United Microelectronics Corp | IC microfilm process |
DE10208728B4 (en) * | 2002-02-28 | 2009-05-07 | Advanced Micro Devices, Inc., Sunnyvale | A method for producing a semiconductor element having different metal silicide regions |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE590576A (en) * | 1959-05-06 | |||
US3160534A (en) * | 1960-10-03 | 1964-12-08 | Gen Telephone & Elect | Method of making tunnel diodes |
US3266127A (en) * | 1964-01-27 | 1966-08-16 | Ibm | Method of forming contacts on semiconductors |
NL132313C (en) * | 1964-12-17 | 1900-01-01 | ||
US3498833A (en) * | 1966-07-08 | 1970-03-03 | Fairchild Camera Instr Co | Double masking technique for integrated circuit |
US3840982A (en) * | 1966-12-28 | 1974-10-15 | Westinghouse Electric Corp | Contacts for semiconductor devices, particularly integrated circuits, and methods of making the same |
GB1286737A (en) * | 1969-10-15 | 1972-08-23 | Itt | Multilevel conductive systems |
GB1363815A (en) * | 1971-12-06 | 1974-08-21 | Tektronix Inc | Semiconductor device and method of producing same |
US3747200A (en) * | 1972-03-31 | 1973-07-24 | Motorola Inc | Integrated circuit fabrication method |
-
1972
- 1972-10-16 JP JP47104283A patent/JPS4960870A/ja active Pending
-
1973
- 1973-10-12 FR FR7336533A patent/FR2203175B1/fr not_active Expired
- 1973-10-15 CA CA183,425A patent/CA989076A/en not_active Expired
- 1973-10-15 NL NL7314156.A patent/NL158026B/en not_active IP Right Cessation
- 1973-10-16 US US05/406,927 patent/US3945347A/en not_active Expired - Lifetime
- 1973-10-16 GB GB4821873A patent/GB1418969A/en not_active Expired
- 1973-10-16 DE DE2351943A patent/DE2351943B2/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
US3945347A (en) | 1976-03-23 |
NL158026B (en) | 1978-09-15 |
FR2203175A1 (en) | 1974-05-10 |
FR2203175B1 (en) | 1977-09-23 |
DE2351943A1 (en) | 1974-05-02 |
DE2351943B2 (en) | 1980-08-07 |
NL7314156A (en) | 1974-04-18 |
JPS4960870A (en) | 1974-06-13 |
CA989076A (en) | 1976-05-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
746 | Register noted 'licences of right' (sect. 46/1977) | ||
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19921016 |