JPS55113334A - Manufacture of passivation film - Google Patents
Manufacture of passivation filmInfo
- Publication number
- JPS55113334A JPS55113334A JP1983179A JP1983179A JPS55113334A JP S55113334 A JPS55113334 A JP S55113334A JP 1983179 A JP1983179 A JP 1983179A JP 1983179 A JP1983179 A JP 1983179A JP S55113334 A JPS55113334 A JP S55113334A
- Authority
- JP
- Japan
- Prior art keywords
- film
- plasma
- amorphous
- psg
- polarization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000002161 passivation Methods 0.000 title 1
- 239000010408 film Substances 0.000 abstract 10
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 4
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 230000010287 polarization Effects 0.000 abstract 2
- 230000001681 protective effect Effects 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000007547 defect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 239000012495 reaction gas Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983179A JPS55113334A (en) | 1979-02-23 | 1979-02-23 | Manufacture of passivation film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983179A JPS55113334A (en) | 1979-02-23 | 1979-02-23 | Manufacture of passivation film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55113334A true JPS55113334A (en) | 1980-09-01 |
| JPS6210017B2 JPS6210017B2 (cg-RX-API-DMAC7.html) | 1987-03-04 |
Family
ID=12010221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1983179A Granted JPS55113334A (en) | 1979-02-23 | 1979-02-23 | Manufacture of passivation film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55113334A (cg-RX-API-DMAC7.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5846644A (ja) * | 1981-09-14 | 1983-03-18 | Oki Electric Ind Co Ltd | 半導体素子 |
| JPS5851523A (ja) * | 1981-09-22 | 1983-03-26 | Fujitsu Ltd | 半導体装置 |
| JPH0245932A (ja) * | 1988-08-06 | 1990-02-15 | Fujitsu Ltd | 半導体装置におけるパッシベーション構造 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SI2646470T1 (sl) | 2010-11-30 | 2017-05-31 | F. Hoffmann-La Roche Ag | Protitelesa proti receptorjem antitransferina in njihova uporaba za prenos terapevtskega enoverižnega variabilnega fragmenta (scfv) prek krvno-možganske pregrade |
-
1979
- 1979-02-23 JP JP1983179A patent/JPS55113334A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5846644A (ja) * | 1981-09-14 | 1983-03-18 | Oki Electric Ind Co Ltd | 半導体素子 |
| JPS5851523A (ja) * | 1981-09-22 | 1983-03-26 | Fujitsu Ltd | 半導体装置 |
| JPH0245932A (ja) * | 1988-08-06 | 1990-02-15 | Fujitsu Ltd | 半導体装置におけるパッシベーション構造 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6210017B2 (cg-RX-API-DMAC7.html) | 1987-03-04 |
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