JPS55112502A - Plate automatic examination unit - Google Patents

Plate automatic examination unit

Info

Publication number
JPS55112502A
JPS55112502A JP1977479A JP1977479A JPS55112502A JP S55112502 A JPS55112502 A JP S55112502A JP 1977479 A JP1977479 A JP 1977479A JP 1977479 A JP1977479 A JP 1977479A JP S55112502 A JPS55112502 A JP S55112502A
Authority
JP
Japan
Prior art keywords
plate
axis direction
stand
light
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1977479A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0159521B2 (enrdf_load_stackoverflow
Inventor
Motoo Hourai
Yasuo Hachikake
Aiichi Ishikawa
Nobuyuki Yoshida
Michio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi High Tech Corp
Original Assignee
Hitachi Ltd
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP1977479A priority Critical patent/JPS55112502A/ja
Publication of JPS55112502A publication Critical patent/JPS55112502A/ja
Publication of JPH0159521B2 publication Critical patent/JPH0159521B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1977479A 1979-02-23 1979-02-23 Plate automatic examination unit Granted JPS55112502A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977479A JPS55112502A (en) 1979-02-23 1979-02-23 Plate automatic examination unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977479A JPS55112502A (en) 1979-02-23 1979-02-23 Plate automatic examination unit

Publications (2)

Publication Number Publication Date
JPS55112502A true JPS55112502A (en) 1980-08-30
JPH0159521B2 JPH0159521B2 (enrdf_load_stackoverflow) 1989-12-18

Family

ID=12008674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977479A Granted JPS55112502A (en) 1979-02-23 1979-02-23 Plate automatic examination unit

Country Status (1)

Country Link
JP (1) JPS55112502A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6013248A (ja) * 1983-07-04 1985-01-23 Koyo Jidoki Kk レ−ザ光による被検査物表面の欠陥部と塵埃の判別方法
JPS6199845A (ja) * 1984-10-22 1986-05-17 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 光学的欠陥検出装置
JPS61278739A (ja) * 1985-06-03 1986-12-09 Hitachi Electronics Eng Co Ltd 異物検査装置
JPS6211148A (ja) * 1985-06-28 1987-01-20 Hitachi Electronics Eng Co Ltd 異物検査装置
JPS6275336A (ja) * 1985-09-30 1987-04-07 Hitachi Electronics Eng Co Ltd 異物検査装置
US7075637B2 (en) 1996-06-04 2006-07-11 Kla-Tencor Corporation Optical scanning system for surface inspection
US7084967B2 (en) 1994-12-08 2006-08-01 KLA —Tencor Corporation Scanning system for inspecting anomalies on surfaces

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7395936B2 (ja) 2019-10-07 2023-12-12 株式会社リコー 撮像光学系およびカメラ装置
JP7497574B2 (ja) 2020-01-29 2024-06-11 株式会社リコー 撮像レンズおよびカメラ装置および移動体

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6013248A (ja) * 1983-07-04 1985-01-23 Koyo Jidoki Kk レ−ザ光による被検査物表面の欠陥部と塵埃の判別方法
JPS6199845A (ja) * 1984-10-22 1986-05-17 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 光学的欠陥検出装置
JPS61278739A (ja) * 1985-06-03 1986-12-09 Hitachi Electronics Eng Co Ltd 異物検査装置
JPS6211148A (ja) * 1985-06-28 1987-01-20 Hitachi Electronics Eng Co Ltd 異物検査装置
JPS6275336A (ja) * 1985-09-30 1987-04-07 Hitachi Electronics Eng Co Ltd 異物検査装置
US7084967B2 (en) 1994-12-08 2006-08-01 KLA —Tencor Corporation Scanning system for inspecting anomalies on surfaces
US7075637B2 (en) 1996-06-04 2006-07-11 Kla-Tencor Corporation Optical scanning system for surface inspection
US7477372B2 (en) 1996-06-04 2009-01-13 Kla-Tencor Technologies Corporation Optical scanning system for surface inspection

Also Published As

Publication number Publication date
JPH0159521B2 (enrdf_load_stackoverflow) 1989-12-18

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