JPS55106331A - Pressure sensor of semiconductor strain gauge - Google Patents

Pressure sensor of semiconductor strain gauge

Info

Publication number
JPS55106331A
JPS55106331A JP1321979A JP1321979A JPS55106331A JP S55106331 A JPS55106331 A JP S55106331A JP 1321979 A JP1321979 A JP 1321979A JP 1321979 A JP1321979 A JP 1321979A JP S55106331 A JPS55106331 A JP S55106331A
Authority
JP
Japan
Prior art keywords
diaphragm
pressure
room
pressure sensor
semiconductor strain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1321979A
Other languages
English (en)
Other versions
JPS6215132B2 (ja
Inventor
Kiyomitsu Suzuki
Motohisa Nishihara
Shigeyuki Kobori
Hideo Sato
Komei Yatsuno
Hiroji Kawakami
Minoru Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1321979A priority Critical patent/JPS55106331A/ja
Publication of JPS55106331A publication Critical patent/JPS55106331A/ja
Publication of JPS6215132B2 publication Critical patent/JPS6215132B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1321979A 1979-02-09 1979-02-09 Pressure sensor of semiconductor strain gauge Granted JPS55106331A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1321979A JPS55106331A (en) 1979-02-09 1979-02-09 Pressure sensor of semiconductor strain gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1321979A JPS55106331A (en) 1979-02-09 1979-02-09 Pressure sensor of semiconductor strain gauge

Publications (2)

Publication Number Publication Date
JPS55106331A true JPS55106331A (en) 1980-08-15
JPS6215132B2 JPS6215132B2 (ja) 1987-04-06

Family

ID=11827053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1321979A Granted JPS55106331A (en) 1979-02-09 1979-02-09 Pressure sensor of semiconductor strain gauge

Country Status (1)

Country Link
JP (1) JPS55106331A (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59176639A (ja) * 1983-03-28 1984-10-06 Toshiba Corp 半導体圧力変換器
JPS60201226A (ja) * 1984-03-27 1985-10-11 Yokogawa Hokushin Electric Corp 圧力センサ
JPS60201229A (ja) * 1984-03-27 1985-10-11 Yokogawa Hokushin Electric Corp 圧力センサ
JPS60201227A (ja) * 1984-03-26 1985-10-11 Yokogawa Hokushin Electric Corp 圧力センサ
JPS60205328A (ja) * 1984-03-30 1985-10-16 Yokogawa Hokushin Electric Corp 圧力センサ
JPS63151833A (ja) * 1986-12-16 1988-06-24 Nec Corp 半導体式圧力センサ
JP2005315890A (ja) * 2004-04-29 2005-11-10 Robert Bosch Gmbh マイクロメカニカルセンサおよびその製造方法

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59176639A (ja) * 1983-03-28 1984-10-06 Toshiba Corp 半導体圧力変換器
JPH0536738B2 (ja) * 1983-03-28 1993-05-31 Tokyo Shibaura Electric Co
JPS60201227A (ja) * 1984-03-26 1985-10-11 Yokogawa Hokushin Electric Corp 圧力センサ
JPH0542607B2 (ja) * 1984-03-26 1993-06-29 Yokogawa Electric Corp
JPS60201226A (ja) * 1984-03-27 1985-10-11 Yokogawa Hokushin Electric Corp 圧力センサ
JPS60201229A (ja) * 1984-03-27 1985-10-11 Yokogawa Hokushin Electric Corp 圧力センサ
JPH0542610B2 (ja) * 1984-03-27 1993-06-29 Yokogawa Electric Corp
JPH0542608B2 (ja) * 1984-03-27 1993-06-29 Yokogawa Electric Corp
JPS60205328A (ja) * 1984-03-30 1985-10-16 Yokogawa Hokushin Electric Corp 圧力センサ
JPH0542611B2 (ja) * 1984-03-30 1993-06-29 Yokogawa Electric Corp
JPS63151833A (ja) * 1986-12-16 1988-06-24 Nec Corp 半導体式圧力センサ
JP2005315890A (ja) * 2004-04-29 2005-11-10 Robert Bosch Gmbh マイクロメカニカルセンサおよびその製造方法

Also Published As

Publication number Publication date
JPS6215132B2 (ja) 1987-04-06

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