JPS55106331A - Pressure sensor of semiconductor strain gauge - Google Patents
Pressure sensor of semiconductor strain gaugeInfo
- Publication number
- JPS55106331A JPS55106331A JP1321979A JP1321979A JPS55106331A JP S55106331 A JPS55106331 A JP S55106331A JP 1321979 A JP1321979 A JP 1321979A JP 1321979 A JP1321979 A JP 1321979A JP S55106331 A JPS55106331 A JP S55106331A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- pressure
- room
- pressure sensor
- semiconductor strain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1321979A JPS55106331A (en) | 1979-02-09 | 1979-02-09 | Pressure sensor of semiconductor strain gauge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1321979A JPS55106331A (en) | 1979-02-09 | 1979-02-09 | Pressure sensor of semiconductor strain gauge |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55106331A true JPS55106331A (en) | 1980-08-15 |
JPS6215132B2 JPS6215132B2 (ja) | 1987-04-06 |
Family
ID=11827053
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1321979A Granted JPS55106331A (en) | 1979-02-09 | 1979-02-09 | Pressure sensor of semiconductor strain gauge |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55106331A (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59176639A (ja) * | 1983-03-28 | 1984-10-06 | Toshiba Corp | 半導体圧力変換器 |
JPS60201226A (ja) * | 1984-03-27 | 1985-10-11 | Yokogawa Hokushin Electric Corp | 圧力センサ |
JPS60201229A (ja) * | 1984-03-27 | 1985-10-11 | Yokogawa Hokushin Electric Corp | 圧力センサ |
JPS60201227A (ja) * | 1984-03-26 | 1985-10-11 | Yokogawa Hokushin Electric Corp | 圧力センサ |
JPS60205328A (ja) * | 1984-03-30 | 1985-10-16 | Yokogawa Hokushin Electric Corp | 圧力センサ |
JPS63151833A (ja) * | 1986-12-16 | 1988-06-24 | Nec Corp | 半導体式圧力センサ |
JP2005315890A (ja) * | 2004-04-29 | 2005-11-10 | Robert Bosch Gmbh | マイクロメカニカルセンサおよびその製造方法 |
-
1979
- 1979-02-09 JP JP1321979A patent/JPS55106331A/ja active Granted
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59176639A (ja) * | 1983-03-28 | 1984-10-06 | Toshiba Corp | 半導体圧力変換器 |
JPH0536738B2 (ja) * | 1983-03-28 | 1993-05-31 | Tokyo Shibaura Electric Co | |
JPS60201227A (ja) * | 1984-03-26 | 1985-10-11 | Yokogawa Hokushin Electric Corp | 圧力センサ |
JPH0542607B2 (ja) * | 1984-03-26 | 1993-06-29 | Yokogawa Electric Corp | |
JPS60201226A (ja) * | 1984-03-27 | 1985-10-11 | Yokogawa Hokushin Electric Corp | 圧力センサ |
JPS60201229A (ja) * | 1984-03-27 | 1985-10-11 | Yokogawa Hokushin Electric Corp | 圧力センサ |
JPH0542610B2 (ja) * | 1984-03-27 | 1993-06-29 | Yokogawa Electric Corp | |
JPH0542608B2 (ja) * | 1984-03-27 | 1993-06-29 | Yokogawa Electric Corp | |
JPS60205328A (ja) * | 1984-03-30 | 1985-10-16 | Yokogawa Hokushin Electric Corp | 圧力センサ |
JPH0542611B2 (ja) * | 1984-03-30 | 1993-06-29 | Yokogawa Electric Corp | |
JPS63151833A (ja) * | 1986-12-16 | 1988-06-24 | Nec Corp | 半導体式圧力センサ |
JP2005315890A (ja) * | 2004-04-29 | 2005-11-10 | Robert Bosch Gmbh | マイクロメカニカルセンサおよびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6215132B2 (ja) | 1987-04-06 |
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