JPS5486265A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5486265A JPS5486265A JP15482677A JP15482677A JPS5486265A JP S5486265 A JPS5486265 A JP S5486265A JP 15482677 A JP15482677 A JP 15482677A JP 15482677 A JP15482677 A JP 15482677A JP S5486265 A JPS5486265 A JP S5486265A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- laser beam
- scribing
- passivation
- radiant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To obtain pellets by effective laser scribing by controlling the laser beam absorptivity of passivation glass through radiant-ray irradiation.
CONSTITUTION: Passivation glass 3 sticking to mesa type thyristor 2 is irradiated with radiant rays such as electron beams and gamma rays to be changed in color and then the colored glass part is irradiated with laser beam 5 for scribing. Since the colored glass becomes high in laser beam absorptivity, braking after laser scribing is simplified and no cracking occurs to the glass. Next, pelletized pellets are heat- treated to recover characteristics as the passivation film of the glass deteriorated by radiant rays.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15482677A JPS5486265A (en) | 1977-12-21 | 1977-12-21 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15482677A JPS5486265A (en) | 1977-12-21 | 1977-12-21 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5486265A true JPS5486265A (en) | 1979-07-09 |
Family
ID=15592715
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15482677A Pending JPS5486265A (en) | 1977-12-21 | 1977-12-21 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5486265A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103477453A (en) * | 2011-04-14 | 2013-12-25 | 欧司朗光电半导体有限公司 | Method for producing a semiconductor body |
JP2014187143A (en) * | 2013-03-22 | 2014-10-02 | Shindengen Electric Mfg Co Ltd | Substrate for forming semiconductor device, method for manufacturing the same, mesa type semiconductor device and method for manufacturing the same |
-
1977
- 1977-12-21 JP JP15482677A patent/JPS5486265A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103477453A (en) * | 2011-04-14 | 2013-12-25 | 欧司朗光电半导体有限公司 | Method for producing a semiconductor body |
JP2014511042A (en) * | 2011-04-14 | 2014-05-01 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | Manufacturing method of semiconductor body |
US9324615B2 (en) | 2011-04-14 | 2016-04-26 | Osram Opto Semiconductors Gmbh | Method for producing a semiconductor body |
US9768344B2 (en) | 2011-04-14 | 2017-09-19 | Osram Opto Semiconductors Gmbh | Method of producing a semiconductor body |
EP2697835B1 (en) * | 2011-04-14 | 2019-09-04 | OSRAM Opto Semiconductors GmbH | Method for producing a semiconductor body |
JP2014187143A (en) * | 2013-03-22 | 2014-10-02 | Shindengen Electric Mfg Co Ltd | Substrate for forming semiconductor device, method for manufacturing the same, mesa type semiconductor device and method for manufacturing the same |
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