JPS5485676A - Glass mask - Google Patents
Glass maskInfo
- Publication number
- JPS5485676A JPS5485676A JP15380277A JP15380277A JPS5485676A JP S5485676 A JPS5485676 A JP S5485676A JP 15380277 A JP15380277 A JP 15380277A JP 15380277 A JP15380277 A JP 15380277A JP S5485676 A JPS5485676 A JP S5485676A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- plasma cvd
- resist
- effective
- glass substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15380277A JPS5485676A (en) | 1977-12-20 | 1977-12-20 | Glass mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15380277A JPS5485676A (en) | 1977-12-20 | 1977-12-20 | Glass mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5485676A true JPS5485676A (en) | 1979-07-07 |
Family
ID=15570435
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15380277A Pending JPS5485676A (en) | 1977-12-20 | 1977-12-20 | Glass mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5485676A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106502040A (zh) * | 2016-11-18 | 2017-03-15 | 中国电子科技集团公司第四十研究所 | 用于化学铣削工艺制作镀金铜带微连接线的光刻掩膜版 |
CN111304744A (zh) * | 2019-11-29 | 2020-06-19 | 深圳市立洋光电子股份有限公司 | Cr2O3晶体的制备方法 |
-
1977
- 1977-12-20 JP JP15380277A patent/JPS5485676A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106502040A (zh) * | 2016-11-18 | 2017-03-15 | 中国电子科技集团公司第四十研究所 | 用于化学铣削工艺制作镀金铜带微连接线的光刻掩膜版 |
CN111304744A (zh) * | 2019-11-29 | 2020-06-19 | 深圳市立洋光电子股份有限公司 | Cr2O3晶体的制备方法 |
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