JPS5475985A - Heat treatment method of semiconductor substrate and its unit - Google Patents

Heat treatment method of semiconductor substrate and its unit

Info

Publication number
JPS5475985A
JPS5475985A JP14345577A JP14345577A JPS5475985A JP S5475985 A JPS5475985 A JP S5475985A JP 14345577 A JP14345577 A JP 14345577A JP 14345577 A JP14345577 A JP 14345577A JP S5475985 A JPS5475985 A JP S5475985A
Authority
JP
Japan
Prior art keywords
boats
heat treatment
boat
support materials
convexes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14345577A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6122856B2 (cg-RX-API-DMAC7.html
Inventor
Tatsunori Nakajima
Kosei Kajiwara
Kuni Ogawa
Kosuke Yasuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP14345577A priority Critical patent/JPS5475985A/ja
Publication of JPS5475985A publication Critical patent/JPS5475985A/ja
Publication of JPS6122856B2 publication Critical patent/JPS6122856B2/ja
Granted legal-status Critical Current

Links

JP14345577A 1977-11-29 1977-11-29 Heat treatment method of semiconductor substrate and its unit Granted JPS5475985A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14345577A JPS5475985A (en) 1977-11-29 1977-11-29 Heat treatment method of semiconductor substrate and its unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14345577A JPS5475985A (en) 1977-11-29 1977-11-29 Heat treatment method of semiconductor substrate and its unit

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP60159026A Division JPS6144425A (ja) 1985-07-18 1985-07-18 半導体基板の熱処理用ボート

Publications (2)

Publication Number Publication Date
JPS5475985A true JPS5475985A (en) 1979-06-18
JPS6122856B2 JPS6122856B2 (cg-RX-API-DMAC7.html) 1986-06-03

Family

ID=15339093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14345577A Granted JPS5475985A (en) 1977-11-29 1977-11-29 Heat treatment method of semiconductor substrate and its unit

Country Status (1)

Country Link
JP (1) JPS5475985A (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961534U (ja) * 1982-10-15 1984-04-23 日本電気株式会社 搬送用ボ−ト
JPS61110444A (ja) * 1984-11-02 1986-05-28 ヘレウス・クアルツシユメルツエ・ゲゼルシヤフト・ミツト・ベシユレンクタ−・ハフツング 保持格子囲い
US6799940B2 (en) 2002-12-05 2004-10-05 Tokyo Electron Limited Removable semiconductor wafer susceptor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961534U (ja) * 1982-10-15 1984-04-23 日本電気株式会社 搬送用ボ−ト
JPS61110444A (ja) * 1984-11-02 1986-05-28 ヘレウス・クアルツシユメルツエ・ゲゼルシヤフト・ミツト・ベシユレンクタ−・ハフツング 保持格子囲い
US6799940B2 (en) 2002-12-05 2004-10-05 Tokyo Electron Limited Removable semiconductor wafer susceptor

Also Published As

Publication number Publication date
JPS6122856B2 (cg-RX-API-DMAC7.html) 1986-06-03

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