JPS5469088A - Capacitor - Google Patents
CapacitorInfo
- Publication number
- JPS5469088A JPS5469088A JP13569777A JP13569777A JPS5469088A JP S5469088 A JPS5469088 A JP S5469088A JP 13569777 A JP13569777 A JP 13569777A JP 13569777 A JP13569777 A JP 13569777A JP S5469088 A JPS5469088 A JP S5469088A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- gate
- source
- capacity
- capacitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: To reduce the area to the capacity value as well as to lower the threshold voltage at the channel part via the ion injection by securing the 3-layer structure through formation of the 1st capacitor with the gate layer and the diffusion layer plus the 2nd capacitor with the gate layer and the wiring layer respectively.
CONSTITUTION: Region 21 to be the source and the drain is formed on semiconductor substrate 20, and insulator layer 22 to form the channel is coates on substrate 20 between the source and drain regions. Then Si gate layer 23 is provided on layer 22, and the entire surface is coated with insulator layer 24. The opening is drilled to drain region 21 at one side, and Al wiring layer 25 is deposited with contact to the opening. As a result, CGS=C1.S2 is obtained for the gate-source capacity, where C1 is the gate-source capacity per unit area and S2 is the gate-A capacity. Thus, the full capacity is increased up to C'=(C1+C2)S2 by the parallel distribution of these gate, source and Al. Furthermore, the threshold level of the voltage is lowered with injection of the ion under layer 22.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13569777A JPS5469088A (en) | 1977-11-14 | 1977-11-14 | Capacitor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13569777A JPS5469088A (en) | 1977-11-14 | 1977-11-14 | Capacitor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5469088A true JPS5469088A (en) | 1979-06-02 |
Family
ID=15157781
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13569777A Pending JPS5469088A (en) | 1977-11-14 | 1977-11-14 | Capacitor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5469088A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05267705A (en) * | 1991-10-04 | 1993-10-15 | Telefunken Syst Technik Ag | Thin solar cell and method of manufacturing therefor |
-
1977
- 1977-11-14 JP JP13569777A patent/JPS5469088A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05267705A (en) * | 1991-10-04 | 1993-10-15 | Telefunken Syst Technik Ag | Thin solar cell and method of manufacturing therefor |
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