JPS5466780A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5466780A
JPS5466780A JP13369477A JP13369477A JPS5466780A JP S5466780 A JPS5466780 A JP S5466780A JP 13369477 A JP13369477 A JP 13369477A JP 13369477 A JP13369477 A JP 13369477A JP S5466780 A JPS5466780 A JP S5466780A
Authority
JP
Japan
Prior art keywords
layer
film
groove
coated
type gaas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13369477A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6129557B2 (cs
Inventor
Toshio Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13369477A priority Critical patent/JPS5466780A/ja
Publication of JPS5466780A publication Critical patent/JPS5466780A/ja
Publication of JPS6129557B2 publication Critical patent/JPS6129557B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP13369477A 1977-11-08 1977-11-08 Manufacture for semiconductor device Granted JPS5466780A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13369477A JPS5466780A (en) 1977-11-08 1977-11-08 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13369477A JPS5466780A (en) 1977-11-08 1977-11-08 Manufacture for semiconductor device

Publications (2)

Publication Number Publication Date
JPS5466780A true JPS5466780A (en) 1979-05-29
JPS6129557B2 JPS6129557B2 (cs) 1986-07-07

Family

ID=15110683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13369477A Granted JPS5466780A (en) 1977-11-08 1977-11-08 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5466780A (cs)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55120168A (en) * 1979-03-08 1980-09-16 Sony Corp Field effect type semiconductor device
JPS59969A (ja) * 1982-06-25 1984-01-06 Nippon Telegr & Teleph Corp <Ntt> 電界効果型トランジスタ
JP2003068761A (ja) * 2001-08-29 2003-03-07 Denso Corp 炭化珪素半導体装置およびその製造方法
JP2003069041A (ja) * 2001-08-29 2003-03-07 Denso Corp 炭化珪素半導体装置及びその製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55120168A (en) * 1979-03-08 1980-09-16 Sony Corp Field effect type semiconductor device
JPS59969A (ja) * 1982-06-25 1984-01-06 Nippon Telegr & Teleph Corp <Ntt> 電界効果型トランジスタ
JP2003068761A (ja) * 2001-08-29 2003-03-07 Denso Corp 炭化珪素半導体装置およびその製造方法
JP2003069041A (ja) * 2001-08-29 2003-03-07 Denso Corp 炭化珪素半導体装置及びその製造方法

Also Published As

Publication number Publication date
JPS6129557B2 (cs) 1986-07-07

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