JPS5464475A - Surface stabilizing method for mesa type semiconductor element - Google Patents
Surface stabilizing method for mesa type semiconductor elementInfo
- Publication number
- JPS5464475A JPS5464475A JP13112877A JP13112877A JPS5464475A JP S5464475 A JPS5464475 A JP S5464475A JP 13112877 A JP13112877 A JP 13112877A JP 13112877 A JP13112877 A JP 13112877A JP S5464475 A JPS5464475 A JP S5464475A
- Authority
- JP
- Japan
- Prior art keywords
- film
- electrode
- substrate
- etching
- mesa etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To reduce the parasitic capacitance, by performing mesa etching after forming metallic electrode on the semiconductor substrate and by stabilizing the substrate surface with the negative oxide film of semiconductor material used for the substrate.
CONSTITUTION: The electrode metallic film is coated on the GaAs substrate 1, and electrode 2 is formed by performing photo etching through the use of the resist film 7. Next, the substrate 1 is made for mesa etching by taking the film 7 and the electrode 2 as masks while leaving the film 7, and the etching surface 3 is made anodic oxidation. At this time, the anodic oxidation is made with the electrolytic method using hydrogen peroxide or made in the mixed solution of glychol and water, and the mesa etching surface 3 is coated with the GaAs native oxide film 8 and the film 7 is removed. Thus, no superimposing part is caused on the electrode 2 and the film 8, and accordingly, no parasitic capacitance is produced. Microwave element excellent in high frequency performance can be obtained.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13112877A JPS5464475A (en) | 1977-10-31 | 1977-10-31 | Surface stabilizing method for mesa type semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13112877A JPS5464475A (en) | 1977-10-31 | 1977-10-31 | Surface stabilizing method for mesa type semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5464475A true JPS5464475A (en) | 1979-05-24 |
Family
ID=15050630
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13112877A Pending JPS5464475A (en) | 1977-10-31 | 1977-10-31 | Surface stabilizing method for mesa type semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5464475A (en) |
-
1977
- 1977-10-31 JP JP13112877A patent/JPS5464475A/en active Pending
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