JPS53125767A - Forming method of anode oxide film - Google Patents

Forming method of anode oxide film

Info

Publication number
JPS53125767A
JPS53125767A JP4051077A JP4051077A JPS53125767A JP S53125767 A JPS53125767 A JP S53125767A JP 4051077 A JP4051077 A JP 4051077A JP 4051077 A JP4051077 A JP 4051077A JP S53125767 A JPS53125767 A JP S53125767A
Authority
JP
Japan
Prior art keywords
oxide film
forming method
anode oxide
thin film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4051077A
Other languages
Japanese (ja)
Inventor
Hidekazu Okabayashi
Koji Mizusawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4051077A priority Critical patent/JPS53125767A/en
Publication of JPS53125767A publication Critical patent/JPS53125767A/en
Pending legal-status Critical Current

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  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To manufacture stable film by simultanesouly oxidizing substrate exposure part and Al thin film through adhering selectively the Al thin film on a III-V group compound semiconductor substrate or its mixed crystal substrate and the anodic oxidation by NH4borate as an electrolyte.
COPYRIGHT: (C)1978,JPO&Japio
JP4051077A 1977-04-08 1977-04-08 Forming method of anode oxide film Pending JPS53125767A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4051077A JPS53125767A (en) 1977-04-08 1977-04-08 Forming method of anode oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4051077A JPS53125767A (en) 1977-04-08 1977-04-08 Forming method of anode oxide film

Publications (1)

Publication Number Publication Date
JPS53125767A true JPS53125767A (en) 1978-11-02

Family

ID=12582532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4051077A Pending JPS53125767A (en) 1977-04-08 1977-04-08 Forming method of anode oxide film

Country Status (1)

Country Link
JP (1) JPS53125767A (en)

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