JPS53125767A - Forming method of anode oxide film - Google Patents
Forming method of anode oxide filmInfo
- Publication number
- JPS53125767A JPS53125767A JP4051077A JP4051077A JPS53125767A JP S53125767 A JPS53125767 A JP S53125767A JP 4051077 A JP4051077 A JP 4051077A JP 4051077 A JP4051077 A JP 4051077A JP S53125767 A JPS53125767 A JP S53125767A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- forming method
- anode oxide
- thin film
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To manufacture stable film by simultanesouly oxidizing substrate exposure part and Al thin film through adhering selectively the Al thin film on a III-V group compound semiconductor substrate or its mixed crystal substrate and the anodic oxidation by NH4borate as an electrolyte.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4051077A JPS53125767A (en) | 1977-04-08 | 1977-04-08 | Forming method of anode oxide film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4051077A JPS53125767A (en) | 1977-04-08 | 1977-04-08 | Forming method of anode oxide film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53125767A true JPS53125767A (en) | 1978-11-02 |
Family
ID=12582532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4051077A Pending JPS53125767A (en) | 1977-04-08 | 1977-04-08 | Forming method of anode oxide film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53125767A (en) |
-
1977
- 1977-04-08 JP JP4051077A patent/JPS53125767A/en active Pending
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