JPS5460568A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5460568A JPS5460568A JP12733377A JP12733377A JPS5460568A JP S5460568 A JPS5460568 A JP S5460568A JP 12733377 A JP12733377 A JP 12733377A JP 12733377 A JP12733377 A JP 12733377A JP S5460568 A JPS5460568 A JP S5460568A
- Authority
- JP
- Japan
- Prior art keywords
- film
- filling
- manufacture
- semiconductor device
- photo resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To secure formation of the thin and uniform film by coating the photo resist film after filling the wafer's concave groove with the filling substance.
CONSTITUTION: Filling substance 5 is filled into mesa groove formed to the Si substrate, and photo resist 5 is coated after the substrate surface is made flat. Thus, a uniform thin film can be formed, enabling use of the both-surface matching machine through the projection system
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12733377A JPS5460568A (en) | 1977-10-24 | 1977-10-24 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12733377A JPS5460568A (en) | 1977-10-24 | 1977-10-24 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5460568A true JPS5460568A (en) | 1979-05-16 |
Family
ID=14957320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12733377A Pending JPS5460568A (en) | 1977-10-24 | 1977-10-24 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5460568A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5269270A (en) * | 1975-12-05 | 1977-06-08 | Matsushita Electronics Corp | Coating method of photoresist |
-
1977
- 1977-10-24 JP JP12733377A patent/JPS5460568A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5269270A (en) * | 1975-12-05 | 1977-06-08 | Matsushita Electronics Corp | Coating method of photoresist |
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