JPS5460568A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5460568A
JPS5460568A JP12733377A JP12733377A JPS5460568A JP S5460568 A JPS5460568 A JP S5460568A JP 12733377 A JP12733377 A JP 12733377A JP 12733377 A JP12733377 A JP 12733377A JP S5460568 A JPS5460568 A JP S5460568A
Authority
JP
Japan
Prior art keywords
film
filling
manufacture
semiconductor device
photo resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12733377A
Other languages
Japanese (ja)
Inventor
Hisao Shirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP12733377A priority Critical patent/JPS5460568A/en
Publication of JPS5460568A publication Critical patent/JPS5460568A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To secure formation of the thin and uniform film by coating the photo resist film after filling the wafer's concave groove with the filling substance.
CONSTITUTION: Filling substance 5 is filled into mesa groove formed to the Si substrate, and photo resist 5 is coated after the substrate surface is made flat. Thus, a uniform thin film can be formed, enabling use of the both-surface matching machine through the projection system
COPYRIGHT: (C)1979,JPO&Japio
JP12733377A 1977-10-24 1977-10-24 Manufacture of semiconductor device Pending JPS5460568A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12733377A JPS5460568A (en) 1977-10-24 1977-10-24 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12733377A JPS5460568A (en) 1977-10-24 1977-10-24 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5460568A true JPS5460568A (en) 1979-05-16

Family

ID=14957320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12733377A Pending JPS5460568A (en) 1977-10-24 1977-10-24 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5460568A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5269270A (en) * 1975-12-05 1977-06-08 Matsushita Electronics Corp Coating method of photoresist

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5269270A (en) * 1975-12-05 1977-06-08 Matsushita Electronics Corp Coating method of photoresist

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