JPS57111261A - Formation of stria of glass base plate - Google Patents

Formation of stria of glass base plate

Info

Publication number
JPS57111261A
JPS57111261A JP18796580A JP18796580A JPS57111261A JP S57111261 A JPS57111261 A JP S57111261A JP 18796580 A JP18796580 A JP 18796580A JP 18796580 A JP18796580 A JP 18796580A JP S57111261 A JPS57111261 A JP S57111261A
Authority
JP
Japan
Prior art keywords
base plate
resin film
glass base
etching
striae
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18796580A
Other languages
Japanese (ja)
Inventor
Satoshi Araihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18796580A priority Critical patent/JPS57111261A/en
Publication of JPS57111261A publication Critical patent/JPS57111261A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Surface Treatment Of Glass (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To prevent super adhesion between photo mask and wafer or master mask and copy mask, by applying a resin film to a glass plate in a striated way, followed by etching the coated plate with an etching solution having the equal etching rate both on the glass base plate and the resin film.
CONSTITUTION: For example, a resin such as the resin film 2 of PVA is applied to the surface of the glass base plate 1 for photo mask by rotary coating in such a way that striae are formed on the surface. The thickness of the resin film 2 is 7,000W8,000 A, and the difference of the thickness betweeen the ridge a and the bottom b of the striae is about 2,000 A. The all surface of the resin film 2 is uniformly etched with an etching solution having the equal etching rate both on the resin film 2 and the glass base plate 1. Consequently, the etching is advanced to the glass base plate 1 at the bottom b of the resin film 2, so that the striae 3 are formed on the surface of the glass base plate 1.
COPYRIGHT: (C)1982,JPO&Japio
JP18796580A 1980-12-29 1980-12-29 Formation of stria of glass base plate Pending JPS57111261A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18796580A JPS57111261A (en) 1980-12-29 1980-12-29 Formation of stria of glass base plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18796580A JPS57111261A (en) 1980-12-29 1980-12-29 Formation of stria of glass base plate

Publications (1)

Publication Number Publication Date
JPS57111261A true JPS57111261A (en) 1982-07-10

Family

ID=16215249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18796580A Pending JPS57111261A (en) 1980-12-29 1980-12-29 Formation of stria of glass base plate

Country Status (1)

Country Link
JP (1) JPS57111261A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0145604A2 (en) * 1983-12-13 1985-06-19 Saint Gobain Vitrage International Method for brazing an electric connector to a current feed conductor of an electrically heated glass

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0145604A2 (en) * 1983-12-13 1985-06-19 Saint Gobain Vitrage International Method for brazing an electric connector to a current feed conductor of an electrically heated glass

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