JPS5458372A - Manufacture for mos type semiconductor integrated circuit - Google Patents
Manufacture for mos type semiconductor integrated circuitInfo
- Publication number
- JPS5458372A JPS5458372A JP12446977A JP12446977A JPS5458372A JP S5458372 A JPS5458372 A JP S5458372A JP 12446977 A JP12446977 A JP 12446977A JP 12446977 A JP12446977 A JP 12446977A JP S5458372 A JPS5458372 A JP S5458372A
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- gate
- manufacture
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 239000010408 film Substances 0.000 abstract 5
- 239000012535 impurity Substances 0.000 abstract 3
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 abstract 2
- 230000003647 oxidation Effects 0.000 abstract 2
- 238000007254 oxidation reaction Methods 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Landscapes
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12446977A JPS5458372A (en) | 1977-10-19 | 1977-10-19 | Manufacture for mos type semiconductor integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12446977A JPS5458372A (en) | 1977-10-19 | 1977-10-19 | Manufacture for mos type semiconductor integrated circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5458372A true JPS5458372A (en) | 1979-05-11 |
| JPS571908B2 JPS571908B2 (enrdf_load_stackoverflow) | 1982-01-13 |
Family
ID=14886285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12446977A Granted JPS5458372A (en) | 1977-10-19 | 1977-10-19 | Manufacture for mos type semiconductor integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5458372A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3606901A1 (de) * | 1986-03-03 | 1987-09-10 | Hilti Ag | Nagelstreifen |
| JPS6427513U (enrdf_load_stackoverflow) * | 1987-08-08 | 1989-02-16 |
-
1977
- 1977-10-19 JP JP12446977A patent/JPS5458372A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS571908B2 (enrdf_load_stackoverflow) | 1982-01-13 |
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