JPS5444483A - Mos type semiconductor device and its manufacture - Google Patents

Mos type semiconductor device and its manufacture

Info

Publication number
JPS5444483A
JPS5444483A JP11072577A JP11072577A JPS5444483A JP S5444483 A JPS5444483 A JP S5444483A JP 11072577 A JP11072577 A JP 11072577A JP 11072577 A JP11072577 A JP 11072577A JP S5444483 A JPS5444483 A JP S5444483A
Authority
JP
Japan
Prior art keywords
gate
film
layers
oxide film
constitution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11072577A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6110996B2 (enrdf_load_stackoverflow
Inventor
Takeya Ezaki
Onori Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11072577A priority Critical patent/JPS5444483A/ja
Publication of JPS5444483A publication Critical patent/JPS5444483A/ja
Publication of JPS6110996B2 publication Critical patent/JPS6110996B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
JP11072577A 1977-09-14 1977-09-14 Mos type semiconductor device and its manufacture Granted JPS5444483A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11072577A JPS5444483A (en) 1977-09-14 1977-09-14 Mos type semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11072577A JPS5444483A (en) 1977-09-14 1977-09-14 Mos type semiconductor device and its manufacture

Publications (2)

Publication Number Publication Date
JPS5444483A true JPS5444483A (en) 1979-04-07
JPS6110996B2 JPS6110996B2 (enrdf_load_stackoverflow) 1986-04-01

Family

ID=14542899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11072577A Granted JPS5444483A (en) 1977-09-14 1977-09-14 Mos type semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS5444483A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562733A (en) * 1978-11-03 1980-05-12 Ibm Method of forming narrow region on silicon substrate
JPS5694777A (en) * 1979-12-20 1981-07-31 Ibm Method of manufacturing semiconductor
JPS57184249A (en) * 1978-11-03 1982-11-12 Ibm Method of forming double dispersion type fet device
JPS59167067A (ja) * 1982-12-28 1984-09-20 マステク，コ−パレイシヤン 電界効果トランジスタの製法
JPS61159768A (ja) * 1978-11-03 1986-07-19 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン 電界効果トランジスタの製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63223397A (ja) * 1987-03-12 1988-09-16 Tsurumi Mfg Co Ltd 電動遠心ポンプの羽根車

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562733A (en) * 1978-11-03 1980-05-12 Ibm Method of forming narrow region on silicon substrate
JPS57184249A (en) * 1978-11-03 1982-11-12 Ibm Method of forming double dispersion type fet device
JPS61159768A (ja) * 1978-11-03 1986-07-19 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン 電界効果トランジスタの製造方法
JPS5694777A (en) * 1979-12-20 1981-07-31 Ibm Method of manufacturing semiconductor
JPS59167067A (ja) * 1982-12-28 1984-09-20 マステク，コ−パレイシヤン 電界効果トランジスタの製法

Also Published As

Publication number Publication date
JPS6110996B2 (enrdf_load_stackoverflow) 1986-04-01

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