JPS5444478A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS5444478A JPS5444478A JP11070577A JP11070577A JPS5444478A JP S5444478 A JPS5444478 A JP S5444478A JP 11070577 A JP11070577 A JP 11070577A JP 11070577 A JP11070577 A JP 11070577A JP S5444478 A JPS5444478 A JP S5444478A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- flat
- etched
- films
- edge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To simply form the isolated, separated and flat substrate without causing swelling of bird head.
CONSTITUTION: The Si substrate 31 is etched by reaction sputtering with double layer of Si3N4 32 and SiO3 33, and the step 34 tilt at the side surface 35 is made by setting the conditions. When coating is made with Si3N4 36, plasma shape reaction gas 39 is vertically radiated, and when the film 36 of the bottom surface 38 is etched, the pattern 36' is left with the film thickness at formation of the side surface, and the edge 40 covers the edge 42 of the films 32 and 33. Next, wet oxide film 44 is formed and it is made almost flat with the substrate surface and further, the films 32 and 33 are removed, obtaining the substrate desired and flat.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11070577A JPS5444478A (en) | 1977-09-14 | 1977-09-14 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11070577A JPS5444478A (en) | 1977-09-14 | 1977-09-14 | Manufacture for semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5444478A true JPS5444478A (en) | 1979-04-07 |
JPS6138609B2 JPS6138609B2 (en) | 1986-08-30 |
Family
ID=14542357
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11070577A Granted JPS5444478A (en) | 1977-09-14 | 1977-09-14 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5444478A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5749235A (en) * | 1980-07-11 | 1982-03-23 | Philips Nv | Method of producing semiconductor device |
JPS5772332A (en) * | 1980-10-23 | 1982-05-06 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS57199232A (en) * | 1981-06-03 | 1982-12-07 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5832430A (en) * | 1981-08-21 | 1983-02-25 | Toshiba Corp | Manufacture of semiconductor device |
-
1977
- 1977-09-14 JP JP11070577A patent/JPS5444478A/en active Granted
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5749235A (en) * | 1980-07-11 | 1982-03-23 | Philips Nv | Method of producing semiconductor device |
JPH0345532B2 (en) * | 1980-07-11 | 1991-07-11 | Fuiritsupusu Furuuiranpenfuaburiken Nv | |
JPS5772332A (en) * | 1980-10-23 | 1982-05-06 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS57199232A (en) * | 1981-06-03 | 1982-12-07 | Fujitsu Ltd | Manufacture of semiconductor device |
JPH0249018B2 (en) * | 1981-06-03 | 1990-10-26 | Fujitsu Ltd | |
JPS5832430A (en) * | 1981-08-21 | 1983-02-25 | Toshiba Corp | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS6138609B2 (en) | 1986-08-30 |
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