JPS54158868A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS54158868A JPS54158868A JP6847278A JP6847278A JPS54158868A JP S54158868 A JPS54158868 A JP S54158868A JP 6847278 A JP6847278 A JP 6847278A JP 6847278 A JP6847278 A JP 6847278A JP S54158868 A JPS54158868 A JP S54158868A
- Authority
- JP
- Japan
- Prior art keywords
- plasma etching
- electric field
- pattern
- short part
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To form an extremely-fine punched pattern without making a short part by carrying out plasma etching while applying an electric field to the punched pattern for a conductive material.
CONSTITUTION: A conductive material such as a poly-crystal silicon film formed on a semiconductor substrate is applied with photosensitive resin and mask exposure and 1st etching are carried out sequentially. Then the 2nd plasma etching of semiconductor substrate 5 formed in this process is done by the plasma etching unit while a fixed electric field is applied by electrode 4. In this process, the convergence of the electric field occurs to the protruding part and short part of the pattern so as to increase greatly the speed of plasma etching, so that an extremely fine punched pattern can be formed with no short part.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6847278A JPS54158868A (en) | 1978-06-06 | 1978-06-06 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6847278A JPS54158868A (en) | 1978-06-06 | 1978-06-06 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54158868A true JPS54158868A (en) | 1979-12-15 |
Family
ID=13374659
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6847278A Pending JPS54158868A (en) | 1978-06-06 | 1978-06-06 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54158868A (en) |
-
1978
- 1978-06-06 JP JP6847278A patent/JPS54158868A/en active Pending
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