JPS54139387A - Production of photo detector - Google Patents
Production of photo detectorInfo
- Publication number
- JPS54139387A JPS54139387A JP4744678A JP4744678A JPS54139387A JP S54139387 A JPS54139387 A JP S54139387A JP 4744678 A JP4744678 A JP 4744678A JP 4744678 A JP4744678 A JP 4744678A JP S54139387 A JPS54139387 A JP S54139387A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- layer
- sio
- carrier density
- convered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 abstract 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 239000010410 layer Substances 0.000 abstract 6
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 150000002500 ions Chemical class 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 2
- 230000035945 sensitivity Effects 0.000 abstract 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- 230000001788 irregular Effects 0.000 abstract 1
- 230000003595 spectral effect Effects 0.000 abstract 1
- 239000002344 surface layer Substances 0.000 abstract 1
Landscapes
- Light Receiving Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4744678A JPS54139387A (en) | 1978-04-20 | 1978-04-20 | Production of photo detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4744678A JPS54139387A (en) | 1978-04-20 | 1978-04-20 | Production of photo detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54139387A true JPS54139387A (en) | 1979-10-29 |
| JPS6138630B2 JPS6138630B2 (enrdf_load_stackoverflow) | 1986-08-30 |
Family
ID=12775363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4744678A Granted JPS54139387A (en) | 1978-04-20 | 1978-04-20 | Production of photo detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54139387A (enrdf_load_stackoverflow) |
-
1978
- 1978-04-20 JP JP4744678A patent/JPS54139387A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6138630B2 (enrdf_load_stackoverflow) | 1986-08-30 |
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