JPS5472991A - Manufacture of photo semiconductor device with monitor - Google Patents

Manufacture of photo semiconductor device with monitor

Info

Publication number
JPS5472991A
JPS5472991A JP14036177A JP14036177A JPS5472991A JP S5472991 A JPS5472991 A JP S5472991A JP 14036177 A JP14036177 A JP 14036177A JP 14036177 A JP14036177 A JP 14036177A JP S5472991 A JPS5472991 A JP S5472991A
Authority
JP
Japan
Prior art keywords
film
substrate
groove
flank
fitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14036177A
Other languages
Japanese (ja)
Other versions
JPS5931998B2 (en
Inventor
Kaneki Matsui
Akira Komuro
Yukio Kurata
Saburo Yamamoto
Morichika Yano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP52140361A priority Critical patent/JPS5931998B2/en
Publication of JPS5472991A publication Critical patent/JPS5472991A/en
Publication of JPS5931998B2 publication Critical patent/JPS5931998B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0262—Photo-diodes, e.g. transceiver devices, bidirectional devices
    • H01S5/0264—Photo-diodes, e.g. transceiver devices, bidirectional devices for monitoring the laser-output

Abstract

PURPOSE:To improve mass-producibility with manufacture simplified by covering the entire surface of a semiconductor substrate with an insulating film after a plural number of grooves are formed in its surface, by diffusion-forming a light-reception diode on its flank surface exposed by removing the film of the groove flank, and then by pelletizing substrate by cutting off it at the center of the groove. CONSTITUTION:On P-type Si substrate 4, SiO2 film 5 is adherd and made into stripes by a photo-lithograpy method, which is used as a mask for etching to provide a plural number of concave grooves 6 in the surface of substrate 4. Next, film 5 is removed, SiO2 film 7 is adhered to the entire surface again, and film 7 on the flank surface of groove 6 is selectively etched and removed. On this flank surface exposed, N-type region 8 is diffusion-formed to obtain the light-reception diode which becomes a photo detector. Next, region 8 is fitted with N-type electrode 9, P- type electrode 10 is also fitted where film 7 on the bottom surface of groove 6 used as the mask at the time of forming region 8 is removed, and P-type electrode 11 is fitted to the reverse surface of substrate 4. Then, the substrate is pelletized by being cut off at the center part of groove 6.
JP52140361A 1977-11-22 1977-11-22 Manufacturing method of optical semiconductor device with monitor Expired JPS5931998B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52140361A JPS5931998B2 (en) 1977-11-22 1977-11-22 Manufacturing method of optical semiconductor device with monitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52140361A JPS5931998B2 (en) 1977-11-22 1977-11-22 Manufacturing method of optical semiconductor device with monitor

Publications (2)

Publication Number Publication Date
JPS5472991A true JPS5472991A (en) 1979-06-11
JPS5931998B2 JPS5931998B2 (en) 1984-08-06

Family

ID=15267026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52140361A Expired JPS5931998B2 (en) 1977-11-22 1977-11-22 Manufacturing method of optical semiconductor device with monitor

Country Status (1)

Country Link
JP (1) JPS5931998B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01244671A (en) * 1988-03-26 1989-09-29 Mitsubishi Electric Corp Semiconductor light emitting device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6313099U (en) * 1986-07-12 1988-01-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01244671A (en) * 1988-03-26 1989-09-29 Mitsubishi Electric Corp Semiconductor light emitting device

Also Published As

Publication number Publication date
JPS5931998B2 (en) 1984-08-06

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