JPS5360579A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5360579A JPS5360579A JP13567076A JP13567076A JPS5360579A JP S5360579 A JPS5360579 A JP S5360579A JP 13567076 A JP13567076 A JP 13567076A JP 13567076 A JP13567076 A JP 13567076A JP S5360579 A JPS5360579 A JP S5360579A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- production
- semiconductor device
- wafers
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
- ing And Chemical Polishing (AREA)
Abstract
PURPOSE: To monitor and control the etching amounts of wafers by measuring the intensity changes owing to the light interferences that the reflected light from the etching and non-etching regions on wafers causes as etching proceeds.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13567076A JPS5360579A (en) | 1976-11-11 | 1976-11-11 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13567076A JPS5360579A (en) | 1976-11-11 | 1976-11-11 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5360579A true JPS5360579A (en) | 1978-05-31 |
Family
ID=15157174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13567076A Pending JPS5360579A (en) | 1976-11-11 | 1976-11-11 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5360579A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6134944A (en) * | 1984-04-13 | 1986-02-19 | アプライド マテリアルズ インコ−ポレ−テツド | Laser interferometer system for monitoring and controlling ic step and method therefor |
-
1976
- 1976-11-11 JP JP13567076A patent/JPS5360579A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6134944A (en) * | 1984-04-13 | 1986-02-19 | アプライド マテリアルズ インコ−ポレ−テツド | Laser interferometer system for monitoring and controlling ic step and method therefor |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5224478A (en) | Semiconductor device manufacturing process | |
JPS5228281A (en) | Light emitting semiconductor device | |
JPS5395571A (en) | Semiconductor device | |
JPS5244186A (en) | Semiconductor intergrated circuit device | |
JPS5255871A (en) | Production of semiconductor | |
JPS5360579A (en) | Production of semiconductor device | |
JPS52140269A (en) | Formation of solder electrode | |
JPS531471A (en) | Manufacture for semiconductor device | |
JPS53123083A (en) | Production of semiconductor device | |
JPS52101979A (en) | Semiconductor device | |
JPS52153665A (en) | Etching method of film | |
JPS5441666A (en) | Semiconductor integrated circuit element | |
JPS51123086A (en) | Semicanductor device and its production process | |
JPS5346222A (en) | Solid state pick up unit | |
JPS51138166A (en) | Production method of semiconductor device | |
JPS5339872A (en) | Etching method of wafers | |
JPS5372567A (en) | Semiconductor device | |
JPS51118369A (en) | Manufacturing process for simiconduator unit | |
JPS52146558A (en) | Production of beam lead type semiconductor device | |
JPS5346270A (en) | Production of semiconductor device | |
JPS5377168A (en) | Production of semiconductor device | |
JPS5321578A (en) | Function inspection method of semiconductor elements | |
JPS52127750A (en) | Production of semiconductor unit | |
JPS53135568A (en) | Manufacture for semiconductor device | |
JPS52147974A (en) | Manufacture of semiconductor device |