JPS5360579A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5360579A
JPS5360579A JP13567076A JP13567076A JPS5360579A JP S5360579 A JPS5360579 A JP S5360579A JP 13567076 A JP13567076 A JP 13567076A JP 13567076 A JP13567076 A JP 13567076A JP S5360579 A JPS5360579 A JP S5360579A
Authority
JP
Japan
Prior art keywords
etching
production
semiconductor device
wafers
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13567076A
Other languages
Japanese (ja)
Inventor
Noboru Okuyama
Akio Takahashi
Teruo Yoneyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13567076A priority Critical patent/JPS5360579A/en
Publication of JPS5360579A publication Critical patent/JPS5360579A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

PURPOSE: To monitor and control the etching amounts of wafers by measuring the intensity changes owing to the light interferences that the reflected light from the etching and non-etching regions on wafers causes as etching proceeds.
COPYRIGHT: (C)1978,JPO&Japio
JP13567076A 1976-11-11 1976-11-11 Production of semiconductor device Pending JPS5360579A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13567076A JPS5360579A (en) 1976-11-11 1976-11-11 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13567076A JPS5360579A (en) 1976-11-11 1976-11-11 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5360579A true JPS5360579A (en) 1978-05-31

Family

ID=15157174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13567076A Pending JPS5360579A (en) 1976-11-11 1976-11-11 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5360579A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6134944A (en) * 1984-04-13 1986-02-19 アプライド　マテリアルズ　インコ−ポレ−テツド Laser interferometer system for monitoring and controlling ic step and method therefor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6134944A (en) * 1984-04-13 1986-02-19 アプライド　マテリアルズ　インコ−ポレ−テツド Laser interferometer system for monitoring and controlling ic step and method therefor

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