JPS6138630B2 - - Google Patents
Info
- Publication number
- JPS6138630B2 JPS6138630B2 JP53047446A JP4744678A JPS6138630B2 JP S6138630 B2 JPS6138630 B2 JP S6138630B2 JP 53047446 A JP53047446 A JP 53047446A JP 4744678 A JP4744678 A JP 4744678A JP S6138630 B2 JPS6138630 B2 JP S6138630B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor layer
- carrier concentration
- layer
- wafer
- junction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 13
- 238000005468 ion implantation Methods 0.000 claims description 12
- 239000012535 impurity Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000001947 vapour-phase growth Methods 0.000 claims description 7
- 238000009826 distribution Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 28
- 239000010410 layer Substances 0.000 description 18
- 230000035945 sensitivity Effects 0.000 description 18
- 230000003595 spectral effect Effects 0.000 description 15
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000002344 surface layer Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 238000000927 vapour-phase epitaxy Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Light Receiving Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4744678A JPS54139387A (en) | 1978-04-20 | 1978-04-20 | Production of photo detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4744678A JPS54139387A (en) | 1978-04-20 | 1978-04-20 | Production of photo detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54139387A JPS54139387A (en) | 1979-10-29 |
| JPS6138630B2 true JPS6138630B2 (enrdf_load_stackoverflow) | 1986-08-30 |
Family
ID=12775363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4744678A Granted JPS54139387A (en) | 1978-04-20 | 1978-04-20 | Production of photo detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54139387A (enrdf_load_stackoverflow) |
-
1978
- 1978-04-20 JP JP4744678A patent/JPS54139387A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54139387A (en) | 1979-10-29 |
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