JPS5399870A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5399870A
JPS5399870A JP1426877A JP1426877A JPS5399870A JP S5399870 A JPS5399870 A JP S5399870A JP 1426877 A JP1426877 A JP 1426877A JP 1426877 A JP1426877 A JP 1426877A JP S5399870 A JPS5399870 A JP S5399870A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
substrate
noncrystal
lump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1426877A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6213818B2 (enrdf_load_stackoverflow
Inventor
Masanobu Miyao
Naoji Yoshihiro
Takashi Tokuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1426877A priority Critical patent/JPS5399870A/ja
Publication of JPS5399870A publication Critical patent/JPS5399870A/ja
Publication of JPS6213818B2 publication Critical patent/JPS6213818B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP1426877A 1977-02-14 1977-02-14 Manufacture of semiconductor device Granted JPS5399870A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1426877A JPS5399870A (en) 1977-02-14 1977-02-14 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1426877A JPS5399870A (en) 1977-02-14 1977-02-14 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5399870A true JPS5399870A (en) 1978-08-31
JPS6213818B2 JPS6213818B2 (enrdf_load_stackoverflow) 1987-03-28

Family

ID=11856333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1426877A Granted JPS5399870A (en) 1977-02-14 1977-02-14 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5399870A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5696856A (en) * 1979-10-11 1981-08-05 Texas Instruments Inc Semiconductor memory cell and method of manufacturing same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5696856A (en) * 1979-10-11 1981-08-05 Texas Instruments Inc Semiconductor memory cell and method of manufacturing same

Also Published As

Publication number Publication date
JPS6213818B2 (enrdf_load_stackoverflow) 1987-03-28

Similar Documents

Publication Publication Date Title
JPS5425178A (en) Manufacture for semiconductor device
JPS5395571A (en) Semiconductor device
JPS53124087A (en) Manufacture of semiconductor device
JPS5370687A (en) Production of semiconductor device
JPS5399870A (en) Manufacture of semiconductor device
JPS51142975A (en) Production method of semiconductor devices
JPS53115187A (en) Semiconductor device
JPS53128285A (en) Semiconductor device and production of the same
JPS5267963A (en) Manufacture of semiconductor unit
JPS5215273A (en) Semiconductor device
JPS5341173A (en) Manufacture of semiconductor device
JPS5410688A (en) Production of semiconductor device
JPS53121466A (en) Manufacture for semiconductor device
JPS52129279A (en) Production of semiconductor device
JPS51145267A (en) Manufacture of semiconductor device
JPS546461A (en) Manufacture of semiconductor device
JPS53126270A (en) Production of semiconductor devices
JPS522384A (en) Semiconductor device
JPS5211772A (en) Semiconductor device
JPS53108381A (en) Manufacture for semiconductor device
JPS5261476A (en) Production of semiconductor device
JPS5263673A (en) Production of semiconductor device
JPS5391590A (en) Manufacture of semiconductor device
JPS5272186A (en) Production of mis type semiconductor device
JPS53114366A (en) Semiconductor device