JPS5371A - Scribing method of semiconductor wafer - Google Patents

Scribing method of semiconductor wafer

Info

Publication number
JPS5371A
JPS5371A JP7468576A JP7468576A JPS5371A JP S5371 A JPS5371 A JP S5371A JP 7468576 A JP7468576 A JP 7468576A JP 7468576 A JP7468576 A JP 7468576A JP S5371 A JPS5371 A JP S5371A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
scribing method
scribing
wafer
laser beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7468576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5642137B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yoshihiko Muraki
Masao Kachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP7468576A priority Critical patent/JPS5371A/ja
Publication of JPS5371A publication Critical patent/JPS5371A/ja
Publication of JPS5642137B2 publication Critical patent/JPS5642137B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
JP7468576A 1976-06-23 1976-06-23 Scribing method of semiconductor wafer Granted JPS5371A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7468576A JPS5371A (en) 1976-06-23 1976-06-23 Scribing method of semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7468576A JPS5371A (en) 1976-06-23 1976-06-23 Scribing method of semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS5371A true JPS5371A (en) 1978-01-05
JPS5642137B2 JPS5642137B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-10-02

Family

ID=13554316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7468576A Granted JPS5371A (en) 1976-06-23 1976-06-23 Scribing method of semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS5371A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4656094A (en) * 1984-07-16 1987-04-07 Nippon Petrochemicals Co., Ltd. Novel multi-layer articles
US4808275A (en) * 1985-03-26 1989-02-28 Nissan Motor Co., Ltd. Method for forming corrosion resistant coating on a disc brake

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4656094A (en) * 1984-07-16 1987-04-07 Nippon Petrochemicals Co., Ltd. Novel multi-layer articles
US4808275A (en) * 1985-03-26 1989-02-28 Nissan Motor Co., Ltd. Method for forming corrosion resistant coating on a disc brake

Also Published As

Publication number Publication date
JPS5642137B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-10-02

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