JPS5371A - Scribing method of semiconductor wafer - Google Patents
Scribing method of semiconductor waferInfo
- Publication number
- JPS5371A JPS5371A JP7468576A JP7468576A JPS5371A JP S5371 A JPS5371 A JP S5371A JP 7468576 A JP7468576 A JP 7468576A JP 7468576 A JP7468576 A JP 7468576A JP S5371 A JPS5371 A JP S5371A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- scribing method
- scribing
- wafer
- laser beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7468576A JPS5371A (en) | 1976-06-23 | 1976-06-23 | Scribing method of semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7468576A JPS5371A (en) | 1976-06-23 | 1976-06-23 | Scribing method of semiconductor wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5371A true JPS5371A (en) | 1978-01-05 |
JPS5642137B2 JPS5642137B2 (ja) | 1981-10-02 |
Family
ID=13554316
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7468576A Granted JPS5371A (en) | 1976-06-23 | 1976-06-23 | Scribing method of semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5371A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4656094A (en) * | 1984-07-16 | 1987-04-07 | Nippon Petrochemicals Co., Ltd. | Novel multi-layer articles |
US4808275A (en) * | 1985-03-26 | 1989-02-28 | Nissan Motor Co., Ltd. | Method for forming corrosion resistant coating on a disc brake |
-
1976
- 1976-06-23 JP JP7468576A patent/JPS5371A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4656094A (en) * | 1984-07-16 | 1987-04-07 | Nippon Petrochemicals Co., Ltd. | Novel multi-layer articles |
US4808275A (en) * | 1985-03-26 | 1989-02-28 | Nissan Motor Co., Ltd. | Method for forming corrosion resistant coating on a disc brake |
Also Published As
Publication number | Publication date |
---|---|
JPS5642137B2 (ja) | 1981-10-02 |
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