JPS5361285A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5361285A
JPS5361285A JP13630676A JP13630676A JPS5361285A JP S5361285 A JPS5361285 A JP S5361285A JP 13630676 A JP13630676 A JP 13630676A JP 13630676 A JP13630676 A JP 13630676A JP S5361285 A JPS5361285 A JP S5361285A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
substrate
side etching
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13630676A
Other languages
Japanese (ja)
Inventor
Hiroshi Tamura
Hisayuki Higuchi
Takahide Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13630676A priority Critical patent/JPS5361285A/en
Publication of JPS5361285A publication Critical patent/JPS5361285A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To independently control the depth of insulation and isolation layers by side etching a substrate by the required amount first then applying anisotropic etching which does not cause side etching, at the time of forming channel stoppers on the substrate bottom through ion implantation.
COPYRIGHT: (C)1978,JPO&Japio
JP13630676A 1976-11-15 1976-11-15 Production of semiconductor device Pending JPS5361285A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13630676A JPS5361285A (en) 1976-11-15 1976-11-15 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13630676A JPS5361285A (en) 1976-11-15 1976-11-15 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5361285A true JPS5361285A (en) 1978-06-01

Family

ID=15172103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13630676A Pending JPS5361285A (en) 1976-11-15 1976-11-15 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5361285A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158943A (en) * 1982-02-25 1983-09-21 レイセオン　カンパニ− Method of producing semiconductor structure
JPS6328067A (en) * 1986-07-22 1988-02-05 Sony Corp Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158943A (en) * 1982-02-25 1983-09-21 レイセオン　カンパニ− Method of producing semiconductor structure
JPS6328067A (en) * 1986-07-22 1988-02-05 Sony Corp Manufacture of semiconductor device

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