JPS5357972A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5357972A JPS5357972A JP13357976A JP13357976A JPS5357972A JP S5357972 A JPS5357972 A JP S5357972A JP 13357976 A JP13357976 A JP 13357976A JP 13357976 A JP13357976 A JP 13357976A JP S5357972 A JPS5357972 A JP S5357972A
- Authority
- JP
- Japan
- Prior art keywords
- film
- semiconductor device
- production
- protecting
- pbtain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To pbtain a surface protecting film of large protecting power without eroding Al films by depositing a SiO2 film on the surface of a semiconductor device formed with Al wiring patterns or bonding pads and growing a Si3N4 film by a plasma method over said film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13357976A JPS5357972A (en) | 1976-11-05 | 1976-11-05 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13357976A JPS5357972A (en) | 1976-11-05 | 1976-11-05 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5357972A true JPS5357972A (en) | 1978-05-25 |
Family
ID=15108099
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13357976A Pending JPS5357972A (en) | 1976-11-05 | 1976-11-05 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5357972A (en) |
-
1976
- 1976-11-05 JP JP13357976A patent/JPS5357972A/en active Pending
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