JPS5357972A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5357972A
JPS5357972A JP13357976A JP13357976A JPS5357972A JP S5357972 A JPS5357972 A JP S5357972A JP 13357976 A JP13357976 A JP 13357976A JP 13357976 A JP13357976 A JP 13357976A JP S5357972 A JPS5357972 A JP S5357972A
Authority
JP
Japan
Prior art keywords
film
semiconductor device
production
protecting
pbtain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13357976A
Other languages
Japanese (ja)
Inventor
Haruhiko Abe
Kuniaki Miyake
Akira Nishimoto
Hirokazu Miyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13357976A priority Critical patent/JPS5357972A/en
Publication of JPS5357972A publication Critical patent/JPS5357972A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To pbtain a surface protecting film of large protecting power without eroding Al films by depositing a SiO2 film on the surface of a semiconductor device formed with Al wiring patterns or bonding pads and growing a Si3N4 film by a plasma method over said film.
COPYRIGHT: (C)1978,JPO&Japio
JP13357976A 1976-11-05 1976-11-05 Production of semiconductor device Pending JPS5357972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13357976A JPS5357972A (en) 1976-11-05 1976-11-05 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13357976A JPS5357972A (en) 1976-11-05 1976-11-05 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5357972A true JPS5357972A (en) 1978-05-25

Family

ID=15108099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13357976A Pending JPS5357972A (en) 1976-11-05 1976-11-05 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5357972A (en)

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