JPS5354484A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5354484A
JPS5354484A JP12977576A JP12977576A JPS5354484A JP S5354484 A JPS5354484 A JP S5354484A JP 12977576 A JP12977576 A JP 12977576A JP 12977576 A JP12977576 A JP 12977576A JP S5354484 A JPS5354484 A JP S5354484A
Authority
JP
Japan
Prior art keywords
film
semiconductor device
depositing
films
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12977576A
Other languages
Japanese (ja)
Inventor
Tatsuya Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP12977576A priority Critical patent/JPS5354484A/en
Publication of JPS5354484A publication Critical patent/JPS5354484A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To form source or drain diffused layers of minimized lateral spreading by depositing a thin SiO2 film and a Si3 N4 film on a Si single crystal substrate, implanting accelerated impurity ions through these films then performing heat treatment.
COPYRIGHT: (C)1978,JPO&Japio
JP12977576A 1976-10-28 1976-10-28 Semiconductor device Pending JPS5354484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12977576A JPS5354484A (en) 1976-10-28 1976-10-28 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12977576A JPS5354484A (en) 1976-10-28 1976-10-28 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5354484A true JPS5354484A (en) 1978-05-17

Family

ID=15017895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12977576A Pending JPS5354484A (en) 1976-10-28 1976-10-28 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5354484A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62106620A (en) * 1985-11-05 1987-05-18 Matsushita Electronics Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62106620A (en) * 1985-11-05 1987-05-18 Matsushita Electronics Corp Manufacture of semiconductor device

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