JPS5354484A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5354484A JPS5354484A JP12977576A JP12977576A JPS5354484A JP S5354484 A JPS5354484 A JP S5354484A JP 12977576 A JP12977576 A JP 12977576A JP 12977576 A JP12977576 A JP 12977576A JP S5354484 A JPS5354484 A JP S5354484A
- Authority
- JP
- Japan
- Prior art keywords
- film
- semiconductor device
- depositing
- films
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To form source or drain diffused layers of minimized lateral spreading by depositing a thin SiO2 film and a Si3 N4 film on a Si single crystal substrate, implanting accelerated impurity ions through these films then performing heat treatment.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12977576A JPS5354484A (en) | 1976-10-28 | 1976-10-28 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12977576A JPS5354484A (en) | 1976-10-28 | 1976-10-28 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5354484A true JPS5354484A (en) | 1978-05-17 |
Family
ID=15017895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12977576A Pending JPS5354484A (en) | 1976-10-28 | 1976-10-28 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5354484A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62106620A (en) * | 1985-11-05 | 1987-05-18 | Matsushita Electronics Corp | Manufacture of semiconductor device |
-
1976
- 1976-10-28 JP JP12977576A patent/JPS5354484A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62106620A (en) * | 1985-11-05 | 1987-05-18 | Matsushita Electronics Corp | Manufacture of semiconductor device |
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