JPS5353976A - Diaphragm for electron beam exposure apparatus - Google Patents
Diaphragm for electron beam exposure apparatusInfo
- Publication number
- JPS5353976A JPS5353976A JP12892676A JP12892676A JPS5353976A JP S5353976 A JPS5353976 A JP S5353976A JP 12892676 A JP12892676 A JP 12892676A JP 12892676 A JP12892676 A JP 12892676A JP S5353976 A JPS5353976 A JP S5353976A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- electron beam
- exposure apparatus
- substrate
- beam exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To increase opening formation accuracy and obtain diaphragm free from deformation by providing a thin layer of a different contained impurity or a different concentration from the of a Si substrate on the surface of the Si substrate, opening through-holes for delineating the openings of the diaphragm and forming holes reaching said through-holes from the back of the substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12892676A JPS5353976A (en) | 1976-10-27 | 1976-10-27 | Diaphragm for electron beam exposure apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12892676A JPS5353976A (en) | 1976-10-27 | 1976-10-27 | Diaphragm for electron beam exposure apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5353976A true JPS5353976A (en) | 1978-05-16 |
Family
ID=14996794
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12892676A Pending JPS5353976A (en) | 1976-10-27 | 1976-10-27 | Diaphragm for electron beam exposure apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5353976A (en) |
-
1976
- 1976-10-27 JP JP12892676A patent/JPS5353976A/en active Pending
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