JPS5346292A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5346292A JPS5346292A JP12139076A JP12139076A JPS5346292A JP S5346292 A JPS5346292 A JP S5346292A JP 12139076 A JP12139076 A JP 12139076A JP 12139076 A JP12139076 A JP 12139076A JP S5346292 A JPS5346292 A JP S5346292A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- production
- polycrystalline
- temperature
- implanting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12139076A JPS5346292A (en) | 1976-10-08 | 1976-10-08 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12139076A JPS5346292A (en) | 1976-10-08 | 1976-10-08 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5346292A true JPS5346292A (en) | 1978-04-25 |
Family
ID=14810001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12139076A Pending JPS5346292A (en) | 1976-10-08 | 1976-10-08 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5346292A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5819625A (ja) * | 1981-07-28 | 1983-02-04 | Fuigaro Giken Kk | 燃焼状態検出方法 |
JPH0547981B2 (ja) * | 1981-12-14 | 1993-07-20 | Fujitsu Ltd |
-
1976
- 1976-10-08 JP JP12139076A patent/JPS5346292A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5819625A (ja) * | 1981-07-28 | 1983-02-04 | Fuigaro Giken Kk | 燃焼状態検出方法 |
JPS6357695B2 (ja) * | 1981-07-28 | 1988-11-11 | Figaro Eng | |
JPH0547981B2 (ja) * | 1981-12-14 | 1993-07-20 | Fujitsu Ltd |
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