JPS534467A - Doping method of group m# element into boron phosphide semiconductor - Google Patents
Doping method of group m# element into boron phosphide semiconductorInfo
- Publication number
- JPS534467A JPS534467A JP7872776A JP7872776A JPS534467A JP S534467 A JPS534467 A JP S534467A JP 7872776 A JP7872776 A JP 7872776A JP 7872776 A JP7872776 A JP 7872776A JP S534467 A JPS534467 A JP S534467A
- Authority
- JP
- Japan
- Prior art keywords
- group
- doping method
- boron phosphide
- phosphide semiconductor
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7872776A JPS534467A (en) | 1976-07-02 | 1976-07-02 | Doping method of group m# element into boron phosphide semiconductor |
DE19772729889 DE2729889C3 (de) | 1976-07-02 | 1977-07-01 | Verfahren zum epitaktischen Aufwachsen von dotiertem Borphosphid auf einem Substrat |
US05/971,440 US4214926A (en) | 1976-07-02 | 1978-12-20 | Method of doping IIb or VIb group elements into a boron phosphide semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7872776A JPS534467A (en) | 1976-07-02 | 1976-07-02 | Doping method of group m# element into boron phosphide semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS534467A true JPS534467A (en) | 1978-01-17 |
JPS5524690B2 JPS5524690B2 (ja) | 1980-07-01 |
Family
ID=13669903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7872776A Granted JPS534467A (en) | 1976-07-02 | 1976-07-02 | Doping method of group m# element into boron phosphide semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS534467A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7018728B2 (en) | 2001-12-14 | 2006-03-28 | Showa Denko K.K. | Boron phosphide-based semiconductor device and production method thereof |
-
1976
- 1976-07-02 JP JP7872776A patent/JPS534467A/ja active Granted
Non-Patent Citations (1)
Title |
---|
JOURNAL CRYSTAL GROWTH#V13#N14=1972 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7018728B2 (en) | 2001-12-14 | 2006-03-28 | Showa Denko K.K. | Boron phosphide-based semiconductor device and production method thereof |
Also Published As
Publication number | Publication date |
---|---|
JPS5524690B2 (ja) | 1980-07-01 |
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