JPS5441680A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5441680A
JPS5441680A JP10775177A JP10775177A JPS5441680A JP S5441680 A JPS5441680 A JP S5441680A JP 10775177 A JP10775177 A JP 10775177A JP 10775177 A JP10775177 A JP 10775177A JP S5441680 A JPS5441680 A JP S5441680A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
growing
concentratonn
rection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10775177A
Other languages
Japanese (ja)
Inventor
Takaya Suzuki
Tetsuo Kosugi
Takuzo Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10775177A priority Critical patent/JPS5441680A/en
Publication of JPS5441680A publication Critical patent/JPS5441680A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make accurate the impurity concentratonn control in growing layer, by mixing HCl with suitable amount in the rection gas, in performing epitaxial growing.
COPYRIGHT: (C)1979,JPO&Japio
JP10775177A 1977-09-09 1977-09-09 Manufacture for semiconductor device Pending JPS5441680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10775177A JPS5441680A (en) 1977-09-09 1977-09-09 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10775177A JPS5441680A (en) 1977-09-09 1977-09-09 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5441680A true JPS5441680A (en) 1979-04-03

Family

ID=14467036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10775177A Pending JPS5441680A (en) 1977-09-09 1977-09-09 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5441680A (en)

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