JPS5323559A - Production of compound semiconductor - Google Patents
Production of compound semiconductorInfo
- Publication number
- JPS5323559A JPS5323559A JP9898876A JP9898876A JPS5323559A JP S5323559 A JPS5323559 A JP S5323559A JP 9898876 A JP9898876 A JP 9898876A JP 9898876 A JP9898876 A JP 9898876A JP S5323559 A JPS5323559 A JP S5323559A
- Authority
- JP
- Japan
- Prior art keywords
- compound semiconductor
- substrate
- production
- epitaxial layer
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To inhibit the interface abnormal diffusion owing to the crystal distortion produced by the difference in the cofficient of thermal expansion between a mask and a substrate by providing recesses through etching in the positions for selective diffusion of the epitaxial layer having the compsotiin differing from those of the substrate grown on a compound semiconductor substrate, diffusing a specified impurity here then removing the epitaxial layer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9898876A JPS5323559A (en) | 1976-08-18 | 1976-08-18 | Production of compound semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9898876A JPS5323559A (en) | 1976-08-18 | 1976-08-18 | Production of compound semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5323559A true JPS5323559A (en) | 1978-03-04 |
Family
ID=14234365
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9898876A Pending JPS5323559A (en) | 1976-08-18 | 1976-08-18 | Production of compound semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5323559A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5885524A (en) * | 1981-11-16 | 1983-05-21 | Mitsubishi Electric Corp | Diffusing method of impurities to semiconductor |
JPH07156019A (en) * | 1993-11-29 | 1995-06-20 | Mitsubishi Electric Corp | Electric discharge machining device |
-
1976
- 1976-08-18 JP JP9898876A patent/JPS5323559A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5885524A (en) * | 1981-11-16 | 1983-05-21 | Mitsubishi Electric Corp | Diffusing method of impurities to semiconductor |
JPH07156019A (en) * | 1993-11-29 | 1995-06-20 | Mitsubishi Electric Corp | Electric discharge machining device |
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