JPS5323559A - Production of compound semiconductor - Google Patents

Production of compound semiconductor

Info

Publication number
JPS5323559A
JPS5323559A JP9898876A JP9898876A JPS5323559A JP S5323559 A JPS5323559 A JP S5323559A JP 9898876 A JP9898876 A JP 9898876A JP 9898876 A JP9898876 A JP 9898876A JP S5323559 A JPS5323559 A JP S5323559A
Authority
JP
Japan
Prior art keywords
compound semiconductor
substrate
production
epitaxial layer
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9898876A
Other languages
Japanese (ja)
Inventor
Takeshi Sakurai
Kazuhisa Murata
Hiroshi Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP9898876A priority Critical patent/JPS5323559A/en
Publication of JPS5323559A publication Critical patent/JPS5323559A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To inhibit the interface abnormal diffusion owing to the crystal distortion produced by the difference in the cofficient of thermal expansion between a mask and a substrate by providing recesses through etching in the positions for selective diffusion of the epitaxial layer having the compsotiin differing from those of the substrate grown on a compound semiconductor substrate, diffusing a specified impurity here then removing the epitaxial layer.
COPYRIGHT: (C)1978,JPO&Japio
JP9898876A 1976-08-18 1976-08-18 Production of compound semiconductor Pending JPS5323559A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9898876A JPS5323559A (en) 1976-08-18 1976-08-18 Production of compound semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9898876A JPS5323559A (en) 1976-08-18 1976-08-18 Production of compound semiconductor

Publications (1)

Publication Number Publication Date
JPS5323559A true JPS5323559A (en) 1978-03-04

Family

ID=14234365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9898876A Pending JPS5323559A (en) 1976-08-18 1976-08-18 Production of compound semiconductor

Country Status (1)

Country Link
JP (1) JPS5323559A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5885524A (en) * 1981-11-16 1983-05-21 Mitsubishi Electric Corp Diffusing method of impurities to semiconductor
JPH07156019A (en) * 1993-11-29 1995-06-20 Mitsubishi Electric Corp Electric discharge machining device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5885524A (en) * 1981-11-16 1983-05-21 Mitsubishi Electric Corp Diffusing method of impurities to semiconductor
JPH07156019A (en) * 1993-11-29 1995-06-20 Mitsubishi Electric Corp Electric discharge machining device

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