JPS5335372A - Beveling method of wafers - Google Patents

Beveling method of wafers

Info

Publication number
JPS5335372A
JPS5335372A JP10955176A JP10955176A JPS5335372A JP S5335372 A JPS5335372 A JP S5335372A JP 10955176 A JP10955176 A JP 10955176A JP 10955176 A JP10955176 A JP 10955176A JP S5335372 A JPS5335372 A JP S5335372A
Authority
JP
Japan
Prior art keywords
wafers
beveling method
beveling
laminate
grindstones
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10955176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5339740B2 (enrdf_load_stackoverflow
Inventor
Junji Watanabe
Hiroshi Nakada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP10955176A priority Critical patent/JPS5335372A/ja
Publication of JPS5335372A publication Critical patent/JPS5335372A/ja
Publication of JPS5339740B2 publication Critical patent/JPS5339740B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
JP10955176A 1976-09-13 1976-09-13 Beveling method of wafers Granted JPS5335372A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10955176A JPS5335372A (en) 1976-09-13 1976-09-13 Beveling method of wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10955176A JPS5335372A (en) 1976-09-13 1976-09-13 Beveling method of wafers

Publications (2)

Publication Number Publication Date
JPS5335372A true JPS5335372A (en) 1978-04-01
JPS5339740B2 JPS5339740B2 (enrdf_load_stackoverflow) 1978-10-23

Family

ID=14513100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10955176A Granted JPS5335372A (en) 1976-09-13 1976-09-13 Beveling method of wafers

Country Status (1)

Country Link
JP (1) JPS5335372A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6286242A (ja) * 1985-10-09 1987-04-20 株式会社フジタ 逆打ち工法
JPS62125119A (ja) * 1985-11-25 1987-06-06 Fudo Kenken Kk 地下室構築方法
JP2013043246A (ja) * 2011-08-24 2013-03-04 Kyocera Crystal Device Corp 水晶片の形成方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6286242A (ja) * 1985-10-09 1987-04-20 株式会社フジタ 逆打ち工法
JPS62125119A (ja) * 1985-11-25 1987-06-06 Fudo Kenken Kk 地下室構築方法
JP2013043246A (ja) * 2011-08-24 2013-03-04 Kyocera Crystal Device Corp 水晶片の形成方法

Also Published As

Publication number Publication date
JPS5339740B2 (enrdf_load_stackoverflow) 1978-10-23

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