JPS5326585A - Production of mis semiconductor device - Google Patents

Production of mis semiconductor device

Info

Publication number
JPS5326585A
JPS5326585A JP10057276A JP10057276A JPS5326585A JP S5326585 A JPS5326585 A JP S5326585A JP 10057276 A JP10057276 A JP 10057276A JP 10057276 A JP10057276 A JP 10057276A JP S5326585 A JPS5326585 A JP S5326585A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
mis semiconductor
substrate
bias
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10057276A
Other languages
Japanese (ja)
Inventor
Yoshio Tominaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10057276A priority Critical patent/JPS5326585A/en
Publication of JPS5326585A publication Critical patent/JPS5326585A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: On the field insulating film of the semicondcutor substrate surface where a MIS semiconductor element is formed, the pad electrode for bias is taken out through a conductor connected to the substrate, so that the conductor wiring for the substrate bias terminal in a ceramic package can be needless.
COPYRIGHT: (C)1978,JPO&Japio
JP10057276A 1976-08-25 1976-08-25 Production of mis semiconductor device Pending JPS5326585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10057276A JPS5326585A (en) 1976-08-25 1976-08-25 Production of mis semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10057276A JPS5326585A (en) 1976-08-25 1976-08-25 Production of mis semiconductor device

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP15327883A Division JPS5980971A (en) 1983-08-24 1983-08-24 Manufacture of mis semiconductor device
JP61006416A Division JPS6230364A (en) 1986-01-17 1986-01-17 Manufacture of mis semiconductor device

Publications (1)

Publication Number Publication Date
JPS5326585A true JPS5326585A (en) 1978-03-11

Family

ID=14277607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10057276A Pending JPS5326585A (en) 1976-08-25 1976-08-25 Production of mis semiconductor device

Country Status (1)

Country Link
JP (1) JPS5326585A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55138874A (en) * 1979-04-18 1980-10-30 Fujitsu Ltd Semiconductor device and method of fabricating the same
JPS5619669A (en) * 1979-07-25 1981-02-24 Nec Corp Semiconductor device and manufacture thereof
JPS6230364A (en) * 1986-01-17 1987-02-09 Hitachi Ltd Manufacture of mis semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55138874A (en) * 1979-04-18 1980-10-30 Fujitsu Ltd Semiconductor device and method of fabricating the same
JPS5619669A (en) * 1979-07-25 1981-02-24 Nec Corp Semiconductor device and manufacture thereof
JPS6230364A (en) * 1986-01-17 1987-02-09 Hitachi Ltd Manufacture of mis semiconductor device

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