JPS5321585A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5321585A JPS5321585A JP9542276A JP9542276A JPS5321585A JP S5321585 A JPS5321585 A JP S5321585A JP 9542276 A JP9542276 A JP 9542276A JP 9542276 A JP9542276 A JP 9542276A JP S5321585 A JPS5321585 A JP S5321585A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- impurity
- film
- throuhg
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To avert the shorting and step cutting at the time of forming wirings throuhg anodization by laminating a first Al film containing an impurity and a second Al film without containing any impurity on a semiconductor substrate formed with elements and selectively anodizing these.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9542276A JPS5321585A (en) | 1976-08-12 | 1976-08-12 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9542276A JPS5321585A (en) | 1976-08-12 | 1976-08-12 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5321585A true JPS5321585A (en) | 1978-02-28 |
Family
ID=14137246
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9542276A Pending JPS5321585A (en) | 1976-08-12 | 1976-08-12 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5321585A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6047423A (en) * | 1983-08-25 | 1985-03-14 | Nippon Telegr & Teleph Corp <Ntt> | Method for pattern formation |
-
1976
- 1976-08-12 JP JP9542276A patent/JPS5321585A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6047423A (en) * | 1983-08-25 | 1985-03-14 | Nippon Telegr & Teleph Corp <Ntt> | Method for pattern formation |
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