JPS5414166A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS5414166A JPS5414166A JP7952277A JP7952277A JPS5414166A JP S5414166 A JPS5414166 A JP S5414166A JP 7952277 A JP7952277 A JP 7952277A JP 7952277 A JP7952277 A JP 7952277A JP S5414166 A JPS5414166 A JP S5414166A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- film
- wiring
- undercut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To avoid the variation in the barrier characteristics, by using the laminated film of Ti and Al for the wiring when the wiring connected to the Pt Schottky electrode provided on the semiconductor substrate is formed, and by decreasing the amount of the undercut of the Ti film at etching through the thickness of Ti film of 2500Å or more.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7952277A JPS5414166A (en) | 1977-07-05 | 1977-07-05 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7952277A JPS5414166A (en) | 1977-07-05 | 1977-07-05 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5414166A true JPS5414166A (en) | 1979-02-02 |
Family
ID=13692305
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7952277A Pending JPS5414166A (en) | 1977-07-05 | 1977-07-05 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5414166A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH034769A (en) * | 1989-05-30 | 1991-01-10 | Lion Corp | Food and drink for preventing hypertension |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5127833A (en) * | 1974-09-02 | 1976-03-09 | Nippon Telegraph & Telephone | CHITANIUM UNOSHOKUKOKUHOHO |
-
1977
- 1977-07-05 JP JP7952277A patent/JPS5414166A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5127833A (en) * | 1974-09-02 | 1976-03-09 | Nippon Telegraph & Telephone | CHITANIUM UNOSHOKUKOKUHOHO |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH034769A (en) * | 1989-05-30 | 1991-01-10 | Lion Corp | Food and drink for preventing hypertension |
JP2722670B2 (en) * | 1989-05-30 | 1998-03-04 | ライオン株式会社 | Food and drink for preventing hypertension and method for producing the same |
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