JPS5414166A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5414166A
JPS5414166A JP7952277A JP7952277A JPS5414166A JP S5414166 A JPS5414166 A JP S5414166A JP 7952277 A JP7952277 A JP 7952277A JP 7952277 A JP7952277 A JP 7952277A JP S5414166 A JPS5414166 A JP S5414166A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
film
wiring
undercut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7952277A
Other languages
Japanese (ja)
Inventor
Yasuyuki Higo
Masayuki Mizukoshi
Masaaki Ishizaka
Shoji Madokoro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP7952277A priority Critical patent/JPS5414166A/en
Publication of JPS5414166A publication Critical patent/JPS5414166A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To avoid the variation in the barrier characteristics, by using the laminated film of Ti and Al for the wiring when the wiring connected to the Pt Schottky electrode provided on the semiconductor substrate is formed, and by decreasing the amount of the undercut of the Ti film at etching through the thickness of Ti film of 2500Å or more.
COPYRIGHT: (C)1979,JPO&Japio
JP7952277A 1977-07-05 1977-07-05 Manufacture for semiconductor device Pending JPS5414166A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7952277A JPS5414166A (en) 1977-07-05 1977-07-05 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7952277A JPS5414166A (en) 1977-07-05 1977-07-05 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5414166A true JPS5414166A (en) 1979-02-02

Family

ID=13692305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7952277A Pending JPS5414166A (en) 1977-07-05 1977-07-05 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5414166A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH034769A (en) * 1989-05-30 1991-01-10 Lion Corp Food and drink for preventing hypertension

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5127833A (en) * 1974-09-02 1976-03-09 Nippon Telegraph & Telephone CHITANIUM UNOSHOKUKOKUHOHO

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5127833A (en) * 1974-09-02 1976-03-09 Nippon Telegraph & Telephone CHITANIUM UNOSHOKUKOKUHOHO

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH034769A (en) * 1989-05-30 1991-01-10 Lion Corp Food and drink for preventing hypertension
JP2722670B2 (en) * 1989-05-30 1998-03-04 ライオン株式会社 Food and drink for preventing hypertension and method for producing the same

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