JPS5386579A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5386579A JPS5386579A JP127877A JP127877A JPS5386579A JP S5386579 A JPS5386579 A JP S5386579A JP 127877 A JP127877 A JP 127877A JP 127877 A JP127877 A JP 127877A JP S5386579 A JPS5386579 A JP S5386579A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- oxide film
- silicon oxide
- passivation films
- cracking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To prevent the occurrence of cracking and provide the strength of passivation films by making vapor-grown sandwich form passivation films of silicon oxide film, silicon nitride film and silicon oxide film on Al wiring.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP127877A JPS5386579A (en) | 1977-01-10 | 1977-01-10 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP127877A JPS5386579A (en) | 1977-01-10 | 1977-01-10 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5386579A true JPS5386579A (en) | 1978-07-31 |
Family
ID=11496977
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP127877A Pending JPS5386579A (en) | 1977-01-10 | 1977-01-10 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5386579A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4826372A (en) * | 1971-08-09 | 1973-04-06 | ||
JPS4852378A (en) * | 1971-11-02 | 1973-07-23 | ||
JPS502866A (en) * | 1973-05-10 | 1975-01-13 |
-
1977
- 1977-01-10 JP JP127877A patent/JPS5386579A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4826372A (en) * | 1971-08-09 | 1973-04-06 | ||
JPS4852378A (en) * | 1971-11-02 | 1973-07-23 | ||
JPS502866A (en) * | 1973-05-10 | 1975-01-13 |
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