JPS5386579A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5386579A
JPS5386579A JP127877A JP127877A JPS5386579A JP S5386579 A JPS5386579 A JP S5386579A JP 127877 A JP127877 A JP 127877A JP 127877 A JP127877 A JP 127877A JP S5386579 A JPS5386579 A JP S5386579A
Authority
JP
Japan
Prior art keywords
semiconductor device
oxide film
silicon oxide
passivation films
cracking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP127877A
Other languages
Japanese (ja)
Inventor
Matsuo Ichinose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP127877A priority Critical patent/JPS5386579A/en
Publication of JPS5386579A publication Critical patent/JPS5386579A/en
Pending legal-status Critical Current

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To prevent the occurrence of cracking and provide the strength of passivation films by making vapor-grown sandwich form passivation films of silicon oxide film, silicon nitride film and silicon oxide film on Al wiring.
COPYRIGHT: (C)1978,JPO&Japio
JP127877A 1977-01-10 1977-01-10 Semiconductor device Pending JPS5386579A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP127877A JPS5386579A (en) 1977-01-10 1977-01-10 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP127877A JPS5386579A (en) 1977-01-10 1977-01-10 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5386579A true JPS5386579A (en) 1978-07-31

Family

ID=11496977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP127877A Pending JPS5386579A (en) 1977-01-10 1977-01-10 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5386579A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4826372A (en) * 1971-08-09 1973-04-06
JPS4852378A (en) * 1971-11-02 1973-07-23
JPS502866A (en) * 1973-05-10 1975-01-13

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4826372A (en) * 1971-08-09 1973-04-06
JPS4852378A (en) * 1971-11-02 1973-07-23
JPS502866A (en) * 1973-05-10 1975-01-13

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